Abstract:Future actively cooled space-borne observatories for the far-infrared, loosely defined as a 1--10 THz band, can potentially reach a sensitivity limited only by background radiation from the Universe. This will result in an increase in observing speed of many orders of magnitude. A spectroscopic instrument on such an observatory requires large arrays of detectors with a sensitivity expressed as a noise equivalent power NEP = 3 $\times 10^{-20}$ $W\surd{Hz}$. We present the design, fabrication, and characterisation of microwave kinetic inductance detectors (MKIDs) for this frequency range reaching the required sensitivity. The devices are based on thin-film NbTiN resonators which use lens-antenna coupling to a submicron-width aluminium transmission line at the shorted end of the resonator where the radiation is absorbed. We optimised the MKID geometry for a low NEP by using a small aluminium volume of $\approx$ 1$\mu m^3$ and fabricating the aluminium section on a very thin (100 nm) SiN membrane. Both methods of optimisation also reduce the effect of excess noise by increasing the responsivity of the device, which is further increased by reducing the parasitic geometrical inductance of the resonator. We measure the sensitivity of eight MKIDs with respect to the power absorbed in the detector using a thermal calibration source filtered in a narrow band around 1.55 THz. We obtain a NEP$_{exp}(P_{abs})\:=\:3.1\pm0.9\times10^{-20}\:W\surd{Hz}$ at a modulation frequency of 200 Hz averaged over all measured MKIDs. The NEP is limited by quasiparticle trapping. The measured sensitivity is sufficient for spectroscopic observations from future, actively cooled space-based observatories. Moreover, the presented device design and assembly can be adapted for frequencies up to $\approx$ 10 THz and can be readily implemented in kilopixel arrays.

Ultraviolet, Optical, and Near-IR Microwave Kinetic Inductance Detector Materials Developments

Optimizing Ti/TiN Multilayers for UV, Optical and Near-IR Microwave Kinetic Inductance Detectors

Design and Performance of Hafnium Optical and Near-IR Kinetic Inductance Detectors

A readout for large arrays of Microwave Kinetic Inductance Detectors

Multiplexed Readout for 1000-pixel Arrays of Microwave Kinetic Inductance Detectors

Development of Microwave Kinetic Inductance Detectors for a THz On-Chip Spectrometer

High Quality Factor Platinum Silicide Microwave Kinetic Inductance Detectors

Ultra-sensitive Super-THz Microwave Kinetic Inductance Detectors for future space telescopes

Development of Thermal Kinetic Inductance Detectors suitable for X-ray spectroscopy

Performance of Hybrid NbTiN-Al Microwave Kinetic Inductance Detectors as Direct Detectors for Sub-millimeter Astronomy

Lens Absorber Coupled MKIDs for Far Infrared Imaging Spectroscopy

Noise analysis and optical response of microwave kinetic inductance detectors with an optical stack

Highly Multiplexible Thermal Kinetic Inductance Detectors for X-Ray Imaging Spectroscopy

Thin film dielectric microstrip kinetic inductance detectors

Polarization Sensitive Multi-Chroic MKIDs

Noise Optimization for MKIDs with Different Design Geometries and Material Selections

Position and energy-resolved particle detection using phonon-mediated microwave kinetic inductance detectors

Investigation of reflection-based measurements of microwave kinetic inductance detectors in the optical bands

Fabrication of antenna-coupled KID array for Cosmic Microwave Background detection

Characterization of a Far-Infrared Kinetic Inductance Detector Prototype for PRIMA