Dynamic and Static Transmission Electron Microscopy Studies on Structural Evaluation of Au nano islands on Si (100) Surface

Ashutosh Rath,R. R. Juluri,P. V. Satyam

DOI: https://doi.org/10.1063/1.4875666

2012-04-20

Abstract:Transmission electron microscopy (TEM) study on morphological changes in gold nanostructures deposited on Si (100) upon annealing under different vacuum conditions has been reported. Au thin films of thickness ~2.0 nm were deposited under high vacuum condition (with the native oxide at the interface of Au and Si) using thermal evaporation. In-situ, high temperature (from room temperature (RT) to 850\degreeC) real time TEM measurements showed the evaluation of gold nanoparticles into rectangular/square shaped gold silicide structures. This has been attributed to selective thermal decomposition of native oxide layer. Ex-situ annealing in low vacuum (10-2 mbar) at 850\degreeC showed no growth of nano-gold silicide structures. Under low vacuum annealing conditions, the creation of oxide could be dominating compared to the decomposition of oxide layers resulting in the formation of barrier layer between Au and Si.

Mesoscale and Nanoscale Physics,Materials Science

What problem does this paper attempt to address?

### What problems does this paper attempt to solve?

This paper mainly explores the morphological changes of gold nanostructures on the Si (100) surface and their interactions with the silicon substrate under different vacuum conditions. Specifically, the author studied the behavior of gold thin films during high - temperature annealing by Transmission Electron Microscopy (TEM), especially the differences between high - vacuum and low - vacuum conditions.

#### Main problems:
1. **Morphological evolution of gold nanostructures on the Si (100) surface**: Study the morphological changes of gold nanoparticles under different temperatures and vacuum conditions.
2. **Influence of the interface oxide layer**: Analyze the influence of the oxide layer at the interface on the reaction between gold and silicon, especially the decomposition and regeneration processes of the oxide layer.
3. **Formation mechanism of gold - silicon alloy (Au - Si) nanostructures**: Explore how gold nanoparticles diffuse and react with the silicon substrate to form gold - silicon alloy structures with specific shapes (such as rectangular or square) under high - vacuum conditions.
4. **Behavior differences under low - vacuum conditions**: Explain why gold nanoparticles cannot form ordered gold - silicon alloy structures but remain as spherical particles under low - vacuum conditions.

#### Research background:
- **Development of nanotechnology**: Traditional top - down manufacturing methods are costly and complex, so simpler self - assembly growth methods need to be explored.
- **Unique properties of gold nanoparticles**: Gold nanoparticles have unique electronic, magnetic, photonic, and catalytic properties and are widely used in energy storage, photonics, communication, and sensing fields.
- **Challenges in controlling nanoparticle morphology**: Controlling the shape, size, and composition of nanoparticles is crucial for regulating their physical and chemical properties, but it is usually affected by the randomness of kinetic and thermodynamic parameters.

#### Research methods:
- **Experimental design**: Deposit a gold thin film with a thickness of about 2.0 nm on the Si (100) substrate by thermal evaporation method and perform high - temperature annealing treatment under different vacuum conditions.
- **Real - time observation**: Use in - situ high - temperature TEM technology to record the dynamic changes of gold nanoparticles during the heating process with a time resolution of milliseconds.
- **Comparative experiment**: Compare the annealing results under high - vacuum and low - vacuum conditions to reveal the influence of vacuum conditions on the reaction between gold nanoparticles and the silicon substrate.

#### Key findings:
- Under high - vacuum conditions, gold nanoparticles will aggregate and diffuse at high temperatures and finally form rectangular or square gold - silicon alloy structures, which is attributed to the selective decomposition of the interface oxide layer.
- Under low - vacuum conditions, because the regeneration speed of the oxide layer is faster than the decomposition speed, gold nanoparticles cannot fully react with the silicon substrate and still remain as spherical particles without forming an ordered gold - silicon alloy structure.

In conclusion, through systematic experiments and real - time observations, this paper reveals the important influence of vacuum conditions on the reaction between gold nanoparticles and the silicon substrate, providing important theoretical basis and technical support for further optimizing the synthesis of nanomaterials.