Abstract:Photonic crystal (PhC) cavities have drawn plenty of attentions during the past several decades for the advantages of ultra-high Q factor and small mode volume. PhC cavities have various applications such as quantum information processing, low threshold lasers, optomechanics, and nonlinear optics. PhC cavities based on silicon material have been heavily investigated due to their compatibility with complementary metal-oxide-semiconductor (CMOS) technology, small feature size and low cost. However, apart from the advantage of high Q factor, silicon based PhC cavities suffer from the drawbacks of high insertion loss because of the mode mismatch with fiber and relatively low sensitivity especially for the sensing application. On the other hand, silicon dioxide (silica) waveguide experience relatively smaller loss and owns a similar refractive index to numerous liquid materials to be detected, which will leads to high sensitivity for a silica based PhC cavity sensor. In this paper, we propose a high Q factor (Q = 15500) silica based PhC nanobeam cavity with high sensitivity (the wavelength shift per refractive index unit (RIU) is S = 338 nm/RIU) at the telecommunication wavelength (1550 nm). Since the refractive index contrast for silica waveguide is low for the realization of the photonic bandgaps, it is essential to utilize a silica waveguide suspended in free space. The PhC nanobeam cavity is then formed by etching a series of elliptical holes, whose dimensions linearly decrease from the center to both ends, directly into the silica waveguide. For the sake of high transmission on-resonance wavelength while maintaining high Q factor, it's important to etch partly into the waveguide, which results in a low-refractive-index perturbation structure. The calculated on-resonance transmission is about 0.26. The novel proposed PhC nanobeam cavity shows a sensitivity 3 times larger than the one based on silicon counterparts and outperforms other low index-contrast PhC cavities by a higher on-resonance transmission. Such a structure can also be used in spectrally filtering system and nonlinear optics.

Deterministic design of wavelength scale, ultra-high Q photonic crystal nanobeam cavities

Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Ultrasmall-V High-Q Photonic Crystal Nanobeam Microcavities Based on Slot and Hollow-Core Waveguides

An Improved Surface-Plasmonic Nanobeam Cavity for Higher Q and Smaller V

High-Q Photonic Crystal Microcavities

High-Q Photonic Crystal Nanobeam Cavities on Silicon

Optimized design for 2×106 ultra-high Q silicon photonic crystal cavities

Ultrahigh-Q photonic crystal cavity created by modulating air hole radius of a waveguide

Optimized Design For 2 X 10(6) Ultra-High Q Silicon Photonic Crystal Cavities

Dynamically Reconfigurable Photonic Crystal Nanobeam Cavities

High-Q photonic nanocavity in a two-dimensional photonic crystal

High-Q photonic crystal cavities in all-semiconductor photonic-crystal heterostructures

Optimal photonic crystal cavities for coupling nanoemitters to photonic integrated circuits

Efficient resonance management in ultrahigh-Q one-dimensional photonic crystal nanocavities fabricated on 300 mm SOI CMOS platform

Ultra high-Q photonic crystal nanocavity design: The effect of a low-epsilon slab material

Dynamic Tuning of the Q Factor in a Photonic Crystal Nanocavity Through Photonic Transitions.

High-Q Weakly Modulated Nanobeam Cavity Based On A Suspended Silicon Dioxide Waveguide

Design and Fabrication of Robust Hybrid Photonic Crystal Cavities

Limitations in design and applications of ultra-small mode volume photonic crystals