Experimental Investigation on Threshold Voltage Instability for β-Ga 2 O 3 MOSFET Under Electrical and Thermal Stress
Zhuolin Jiang,Yuxi Wei,Yuanjie Lv,Jie Wei,Yuangang Wang,Juan Lu,Hongyu Liu,Zhihong Feng,Hong Zhou,Jincheng Zhang,Guangwei Xu,Shibing Long,Xiaorong Luo
DOI: https://doi.org/10.1109/ted.2022.3188584
IF: 3.1
2022-09-03
IEEE Transactions on Electron Devices
Abstract:A -Ga 2 O 3 MOSFET is fabricated and its threshold voltage instability mechanisms are experimentally investigated under different gate-biased voltages and ambient temperatures. Under the condition of the positive bias stress (PBS) of V for 1000 s at room temperature, the positive shift of 0.61 V is mainly caused by the electrons trapped by border traps in Al 2 O 3 . Combining the hysteresis with temperature-dependent performance analysis, the clockwise to anticlockwise hysteresis inversion at 125 °C is discovered in -Ga 2 O 3 MOSFET for the first time, which is probably caused by the activation of deep-level acceptor-type interface states. The deep-level acceptor-type interface states with a fitting activation energy of 114 meV are found, and they also affect the instability at high temperature. With the stress of V at 125 °C for 1000 s, is increased by 0.9 V. Analyzing electrical parameters, such as , subthreshold slope (SS), and hysteresis width, can distinguish the quantitative contributions of interface states and border traps to - tex-math notation="LaTeX"> instability under electrical stress and thermal stress (TS). This work reveals an important indication for investigating the instability of -Ga 2 O 3 MOSFET in high-power applications.
engineering, electrical & electronic,physics, applied