Abstract:SrTiO3 is not only of enduring interest due to its unique dielectric, structural, and lattice dynamical properties, but is also the archetypal perovskite oxide semiconductor and a foundational material in oxide heterostructures and electronics. This has naturally focused attention on growth, stoichiometry, and defects in SrTiO3, one exciting recent development being such precisely stoichiometric defect-managed thin films that electron mobilities have finally exceeded bulk crystals. This has been achieved only by molecular beam epitaxy, however (and to a somewhat lesser extent pulsed laser deposition (PLD)), and numerous open questions remain. Here, we present a study of the stoichiometry, defects, and structure in SrTiO3 synthesized by a different method, high pressure oxygen sputtering, relating the results to electronic transport. We find that this form of sputter deposition is also capable of homoepitaxy of precisely stoichiometric SrTiO3, but only provided that substrate and target preparation, temperature, pressure, and deposition rate are carefully controlled. Even under these conditions, oxygen-vacancy-doped heteroepitaxial SrTiO3 films are found to have carrier density, mobility, and conductivity significantly lower than bulk. While surface depletion plays a role, it is argued from particle-induced X-ray emission (PIXE) measurements of trace impurities in commercial sputtering targets that this is also due to deep acceptors such as Fe at 100's of parts-per-million levels. Comparisons of PIXE from SrTiO3 crystals and polycrystalline targets are shown to be of general interest, with clear implications for sputter and PLD deposition of this important material.

Electrostatic charge accumulation versus electrochemical doping in SrTiO3 electric double layer transistors

Electrolyte gate-controlled Kondo effect in SrTiO3

Mechanical Writing of N-Type Conductive Layers on the SrTiO3 Surface in Nanoscale

Unravelling Oxygen-Vacancy-induced Electron Transfer at SrTiO3-based Heterointerfaces by Transport Measurement During Growth

Visible-light-enhanced gating effect at the LaAlO₃/SrTiO₃ interface.

Electrostatic Modulation of the Lateral Carrier Density Profile in Field Effect Devices with Nonlinear Dielectrics

Distinct differences in surface transport between electrolyte-gated (110) and (001) SrTiO3

Visible-light-enhanced gating effect at the LaAlO 3 /SrTiO 3 interface

Current Conduction And Stability Of Ceo2/La2o3 Stacked Gate Dielectric

Voltage Controlled Interfacial Layering in an Ionic Liquid on SrTiO$_3$

Phase diagram of electrostatically doped Strontium Titanate (SrTiO3)

Detection of charge transfer processes in Cr-doped SrTiO3 single crystals

Electrostatic carrier doping of GdTiO3/SrTiO3 interfaces

Carrier‐Modulated Anomalous Electron Transport in Electrolyte‐Gated SrTiO3

Accessible Switching of Electronic Defect Type in SrTiO3 Via Biaxial Strain

Unidirectional Charge Orders Induced by Oxygen Vacancies on SrTiO_3(001)

Electrostatic and Electrochemical Nature of Liquid-Gated Electric-Double-Layer Transistors Based on Oxide Semiconductors

Unidirectional charge orders induced by oxygen vacancies on SrTiO$_3$(001)

Charge Transport in a Polar Metal

Enhancing the electron mobility via delta-doping in SrTiO3

Defects, stoichiometry, and electronic transport in SrTiO3-δ epilayers: A high pressure oxygen sputter deposition study