Abstract:Microelectronic integration is a key enabler for the ubiquitous deployment of devices in large volumes ranging from MEMS and imaging sensors to consumer electronics. Such integration has also been achieved in photonics, where compact optical transceivers for data centers employ co-integrated photonic and electronic components. Chip-scale integration is of particular interest to coherent laser ranging i.e. frequency modulated continuous wave (FMCW LiDAR), a perception technology that benefits from instantaneous velocity and distance detection, eye-safe operation, long-range and immunity to interference. Full wafer-scale integration of this technology has been compounded by the stringent requirements on the lasers, requiring high optical coherence, low chirp nonlinearity and requiring optical amplifiers. Here, we overcome this challenge and demonstrate a photonic-electronic integrated circuit-based coherent LiDAR engine, that combined all functionalities using fully foundry-compatible wafer scale manufacturing. It is comprised of a micro-electronic based high voltage arbitrary waveform generator, a hybrid photonic circuit based tunable Vernier laser with piezoelectric actuators, and an erbium-doped waveguide optical amplifier - all realized in a wafer scale manufacturing compatible process that comprises III-V semiconductors, SiN silicon nitride photonic integrated circuits as well as 130nm SiGe BiCMOS technology. The source is a turnkey, linearization-free, and can serve as a 'drop-in' solution in any FMCW LiDAR, that can be seamlessly integrated with an existing focal plane and optical phased array LiDAR approaches, constituting a missing step towards a fully chip-scale integrated LiDAR system.

Focal Plane Array Chip with Integrated Transmit Antenna and Receive Array for LiDAR

A Fully Solid-State Beam Scanner for FMCW LiDAR Application

A Wide Dynamic Range Analog Front-End with Reconfigurable Transimpedance Amplifier for Direct ToF LiDAR

A 16-Channel Analog CMOS SiPM with On-Chip Front-End for D-ToF LiDAR

Hitless Two-Dimensional Focal Plane Switch Array Based on MZI-embedded MRRs

On-Chip Multi-Beam Emitting Optical Phased Array for Wide-Angle LIDAR

Beam-Steering Based on Dispersive Optical Phased Array for FMCW LiDAR Application

A Hybrid Solid-State Beam Scanner for FMCW LiDAR Application.

A Hybrid Solid-State Beam Scanner for LiDAR Applications

SiN-on-SOI Optical Phased Array LiDAR for Ultra-Wide Field of View and 4D Sensing

Imaging of the Mid-Infrared Focal Plane Array with a Modified Read-Out Circuit.

A Single-Chip Multi-Beam Steering Optical Phased Array: Design Rules and Simulations

Solid-state FMCW LiDAR with Two-Dimensional Spectral Scanning Using a Virtually Imaged Phased Array.

Virtually Imaged Phased-Array-based 2D Nonmechanical Beam-Steering Device for FMCW LiDAR.

High SNR signal processing system for coherent solid-state LIDAR with silicon photonic balanced photodetector array

Solid-state FMCW LiDAR with in-fiber beam scanner

A Large-Range Steering Optical Phased Array Chip and High-Speed Controlling System

Pixel Multiplexing Technique For Real-Time Three-Dimensional-Imaging Laser Detection And Ranging System Using Four Linear-Mode Avalanche Photodiodes

Photonic-electronic integrated circuit-based coherent LiDAR engine

A large-scale microelectromechanical-systems-based silicon photonics LiDAR

Solid-State Dtof LiDAR System Using an Eight-Channel Addressable, 20w/ch Transmitter, and a 128x128 SPAD Receiver with SNR-Based Pixel Binning and Resolution Upscaling.