H. Pernegger,P. Allport,D.V. Berlea,A. Birman,D. Bortoletto,C. Buttar,E. Charbon,F. Dachs,V. Dao,H. Denizli,D. Dobrijevic,M. Dyndal,A. Fenigstein,L. Flores Sanz de Acedo,P. Freeman,A. Gabrielli,M. Gazi,L. Gonella,V. Gonzalez,G. Gustavino,A. Haim,T. Kugathasan,M. LeBlanc,M. Munker,K.Y. Oyulmaz,F. Piro,P. Riedler,H. Sandaker,E.J. Schioppa,A. Sharma,W. Snoeys,C. Solans Sanchez,T. Suligoj,E. Toledano,M. van Rijnbach,M. Vazquez Nunez,J. Weick,S. Worm,A.M. Zoubir

Abstract:Depleted Monolithic Active Pixel Sensor (DMAPS) sensors developed in the Tower Semiconductor 180 nm CMOS imaging process have been designed in the context of the ATLAS ITk upgrade Phase-II at the HL-LHC and for future collider experiments. The "MALTA-Czochralski (MALTA-Cz)" full size DMAPS sensor has been developed with the goal to demonstrate a radiation hard, thin CMOS sensor with high granularity, high hit-rate capability, fast response time and superior radiation tolerance. The small pixel size ($36.4\times 36.4$~$\mu$m$^2$) provides high spatial resolution. Its asynchronous readout architecture is designed for high hit-rates and fast time response in triggered and trigger-less detector applications. The readout architecture is designed to stream all hit data to the multi-channel output which allows an off-sensor trigger formation and the use of hit-time information for event tagging. The sensor manufacturing has been optimised through process adaptation and special implant designs to allow the manufacturing of small electrode DMAPS on thick high-resistivity p-type Czochralski substrate. The special processing ensures excellent charge collection and charge particle detection efficiency even after a high level of radiation. Furthermore the special implant design and use of a Czochralski substrate improves the sensor's time resolution. This paper presents a summary of sensor design optimisation through process and implant choices and TCAD simulation to model the signal response. Beam and laboratory test results on unirradiated and irradiated sensors have shown excellent detection efficiency after a dose of $2\times10^{15}$ 1 MeV n$_{eq}$/cm$^{2}$. The time resolution of the sensor is measured to be $\sigma=2$~ns.

Realistic Simulation of the MAPS Response

Measurements and simulations of MAPS (Monolithic Active Pixel Sensors) response to charged particles - a study towards a vertex detector at the ILC

Simulations and Performance Studies of a MAPS in 65 nm CMOS Imaging Technology

A Full Functional Monolithic Active Pixel Sensor Prototype for the CEPC Vertex Detector

Beam Test of a Monolithic Active Pixel Sensor for the CEPC Vertex Detector

Towards a Realistic Monte Carlo Simulation of the MPD Detector at NICA

A derivation of the electric field inside MAPS detectors from beam-test data and limited TCAD simulations

Applications of CMOS technology at the ALICE experiment

Color Bosonization, Chiral Parametrization of Gluonic Field and QCD Effective Action

ALICE ITS3: how to integrate a large dimension MAPS sensor in a bent configuration detector

CMOS pixel sensors optimized for large ionizing dynamic

Simulation of the CMS Resistive Plate Chambers

A Standalone Simulation Framework of the MRPC Detector Read out in Waveforms

MALTA-Cz: A radiation hard full-size monolithic CMOS sensor with small electrodes on high-resistivity Czochralski substrate

Depleted Fully Monolithic Active CMOS Pixel Sensors (DMAPS) in High Resistivity 150~nm Technology for LHC

ALICE ITS3: a bent stitched MAPS-based vertex detector

A monolithic active pixel sensor with node-based, data-driven, parallel readout for the high energy physics experiment vertex detector

A Monte Carlo Triple-Gem Simulation Tuned with Data

Mighty Tracker -- Performance Studies of the MightyPix for LHCb

TCAD simulation of small-pitch 3D sensors for pixel detector upgrades at High Luminosity LHC

Characterization results of MAPS digital prototypes for the ALICE ITS3