Integrated 3D Sound Intensity Sensor with Four-Wire Particle Velocity Sensors

Doekle Yntema,Joost Van Honschoten,Remco Wiegerink
DOI: https://doi.org/10.48550/arXiv.0805.0906
2008-05-07
Abstract:A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded "back chamber" at both sides of the chip.
Other Computer Science
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