Abstract:Abstract The rapid development of various micro-electro-mechanical systems (MEMS) over the past few decades has served as a cornerstone for precisely probing thermal transport in a rich variety of nanomaterials and nanostructures. However, numerous materials that are macroscopic (millimeter scale and above) at least in one dimension, such as metal wires, carbon fibers, and polymer fibers/films, have remained largely inaccessible by MEMS-based approaches. Considering the great fundamental and technological value of these materials, we propose the concept of “big MEMS” here as an effort to fill this notable gap. The idea is to create macroscopic measurement devices through standard MEMS techniques. For demonstration, we present a novel process that enables silicon-based suspended devices of millimeter to centimeter dimensions to be fabricated reliably, reconfigurably, and at low cost. In particular, the beam thermal conductance of our big-MEMS devices can be tuned from around 1.1 to 0.2 mW/K. Combined with a temperature resolution down to ~20 µK, these devices are suitable for characterizing materials spanning a broad range of thermal conductivity. As an example, the thermal conductivity of platinum wires with a diameter of 20 µm and lengths up to 3.5 mm are measured. Moreover, intriguing transport phenomena such as divergent thermal conductivity and heat flow mediated by surface polaritons can be explored considering their inherent need for multiscale analysis. In principle, our concept of big-MEMS can also be applied to the study of thermal diffusivity, heat capacity, charge transport, and beyond.

A Monolithic Three-Dimensional Thermal Convective Acoustic Vector Sensor with Acoustic-Transparent Heat Sink.

A Monolithic Integrated MEMS Acoustic Dyadic Sensor

Three-hot-wire Acoustic Particle Velocity Sensor with Improved Detection Capability

An Analytical Model of Three-Hot-wire Acoustic Particle Velocity Sensors

Simultaneous Thickness, Velocity, Density, and Attenuation Measurement of a Thin Layer by Time-Resolved Acoustic Microscopy

ANEMOMETER WITH THREE-DIMENSIONAL DIRECTIONALITY FOR DETECTION OF VERY LOW SPEED AIR FLOW AND ACOUSTIC PARTICLE VELOCITY DETECTING CAPABILITY

Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor

A COMPACT ACOUSTIC PARTICLE VELOCITY GRADIENT SENSOR BASED ON MEMS HOT-WIRE SENSOR CHIPS

A Gas Medium Approach to Sensitivity Improvement of MEMS-Based Thermal Acoustic Particle Velocity Sensors

Research on Transmission Performance of a Surface Acoustic Wave Sensing System Used in Manufacturing Environment Monitoring

A novel five-wire micro anemometer with 3D directionality for low speed air flow detection and acoustic particle velocity detecting capability

VECTOR: Velocity Based Temperature-field Monitoring with Distributed Acoustic Devices.

Directional Resonant MEMS Acoustic Sensor and Associated Acoustic Vector Sensor

Optimizations of Composited Acoustic Sensors with A Microfluidic Channel

A Mems Acoustic Particle Velocity Sensor Based on Electrochemical Method

Big MEMS for Thermal Measurement

Fabrication and Characterization of Monolithic Integrated Three-Axis Acceleration/Pressure/Magnetic Field Sensors

Thermal Control Design and Packaging for Surface Acoustic Wave Devices in Acoustofluidics

A Micro Air Velocity Sensor for Measuring the Internal Environment of the Cold Air Ducts of Heating, Ventilation, and Air Conditioning Systems

A Structure-Optimized Acoustic Particle Velocity Sensor with Improved Sensitivity and Self-Noise

Ultra-High Frequency Surface Acoustic Wave Sensors for Temperature Detection