Abstract:Data are presented on mutual and self-inductance of various inductors used in multilayered superconductor integrated circuits: microstrips and striplines with widths of signal traces from 250 nm to a few micrometers, located on the same circuit layer at various distances from each other (from 250 nm to a few micrometers) and/or on different layers spaced vertically; effect of long slits in the ground plane(s) along the inductors on their mutual inductance; inductance of right-angled bends; inductance of meanders. Simple analytical expressions for mutual and self-inductance of the basic inductors are given, describing experimental data with accuracy better than 2% in a very wide range of parameters. They can be used for superconductor integrated circuit design and calibration of numerical inductance extractors. Measurements were done using circuits fabricated in fully planarized fabrication processes with eight niobium layers and Nb/Al-AlOx/Nb Josephson junctions, known as the SFQ5ee and SC1 processes developed at MIT Lincoln Laboratory for superconductor electronics. Mutual inductance decreases exponentially with distance between striplines and as a second power of the distance between microstrips, strongly depends on magnetic field penetration depths in superconducting ground planes, whereas superconducting properties of the signal traces are practically immaterial. Weak dependence of mutual inductance on the linewidth of superconducting wires indicates that area of superconducting flux transformers - the essential component of all digital circuits using ac power, superconducting qubits, and sensor arrays - scales poorly with the linewidth, putting a predictable upper limit on the integration scale of such circuits.

Thin Ohmic or superconducting strip with an applied ac electric current

Thin superconductors and SQUIDs in perpendicular magnetic field

Broadband Measurements of the Surface Impedance in Ferromagnetic Wires As a Boundary Condition for Scattering Problems

Kinetic inductance of superconducting nanostrips with turns

Approaching the Lowest Operating Frequency Thickness Limits with Complex Surface Impedance of Ultrathin Absorbers.

Microwave inductance of thin metal strips

AC Analysis of a High Temperature Superconductor Coil with Short Circuits

Length Effect on Giant Magneto-Impedance in Glass-Covered Co-rich Amorphous Wire

AC losses in superconducting composite strips in a magnetic field in the form of a standing wave

The Longitudinal Critical Current of a Thin Film of Type II Superconductors

Critical Current Density Measurement of Thin Films by AC Susceptibility Based on the Penetration Parameter H

Mutual and self-inductance in planarized multilayered superconductor integrated circuits: Microstrips, striplines, bends, meanders, ground plane perforations

Study of the anomalous skin effect of normal conducting film

Analytical investigation of magnetic field distributions around superconducting strips on ferromagnetic substrates

Numerical determination of the threshold magnetic field in superconducting strips and coils triggering dynamic resistance

Hysteretic ac loss of polygonally arranged superconducting strips carrying ac transport current

Response of thin-film SQUIDs to applied fields and vortex fields: Linear SQUIDs

Current Distribution for Superconducting Strip Transmission Lines at Microwave Frequencies

Alternating current loss in radially arranged superconducting strips

Simultaneous determination of electrical conductivity and thickness of nonmagnetic metallic foils using two-sided multifrequency eddy current techniques

Analytic Solutions for the Ac Resistance and Internal Inductance of a Superconductive Circular Two‐wire Transmission Line