Laser assisted diamond turning of silicon freeform surface

Kaiyuan You,Guangyu Liu,Wei Wang,Fengzhou Fang
DOI: https://doi.org/10.1016/j.jmatprotec.2023.118172
IF: 6.3
2023-10-06
Journal of Materials Processing Technology
Abstract:Freeform optics find wide applications in the field of illumination, imaging, and bio-medical devices. It is difficult to achieve high-quality, high-precision, and high-efficiency freeform machining on hard and brittle material substrate due to its brittle nature and severe diamond tool wear. Laser assisted diamond turning (LADT) method can effectively promote diamond tool life and machining quality. However, it is a difficult for LADT to ensure the stability of the thermal field and the accuracy of freeform surfaces. To overcome the defects, the PID laser power controller is utilized to accurately maintain the laser heating temperature in the ideal range, which is determined by the high-temperature nanoindentation tests. The LADT thermal expansion is also pre-compensated in the tool path according to the finite element thermal analysis results. The experimental results indicate that silicon freeform optics without thermal defects can be achieved with adaptive laser power in-process heating assistance. The effective improvement of form accuracy confirms the feasibility of the proposed tool path thermal pre-compensation method. Challenges and prospects are discussed to guide future studies.
materials science, multidisciplinary,engineering, manufacturing, industrial
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