One Hundred Years of Quantum Physics

Daniel Kleppner,Roman Jackiw

DOI: https://doi.org/10.48550/arXiv.quant-ph/0008092

2000-08-23

Abstract:On the occasion of the 100th anniversary of the birth of the quantum idea, the development, achievements, and promises of quantum mechanics are described.

Quantum Physics,History and Philosophy of Physics

What problem does this paper attempt to address?

Novel Gas-Doping Technique for Local Spectroscopic Measurements in Pulsed-Power Systems

R. Arad,L. Ding,Y. Maron

DOI: https://doi.org/10.48550/arXiv.physics/9808019

1998-08-16

Plasma Physics

Abstract:A novel method for doping plasmas in pulsed-power experiments with gaseous elements has been developed. A fast gas valve, a nozzle, and a skimmer are used to generate an ultrasonic gas beam that is injected into a planar-geometry microsecond plasma-opening-switch (POS). An array of ionization probes with relatively high spatial and temporal resolutions was developed for diagnosing the absolute injected-gas density and its spatial profile. The properties of the gas column were also studied using spectroscopy of line emission that results from the interaction of the doped gas with the POS prefilled plasma. The doped column is found to have a width of ~1 cm and a density of (0.8-1.7)*10^14 cm-3. Observations of characteristic emission lines from the doped atoms and their ions allow for various spectroscopic measurements, such as the magnetic field from Zeeman splitting and the ion velocity distributions from Doppler shifts, that are local in three dimensions. It is shown that this gas doping technique can also be used to study proton-dominated plasmas that cannot be studied with simple emission spectroscopy due to the lack of light emitting ions. The variety of gases used with this method, together with the small valve dimensions and its fast opening, make it potentially useful for broad diagnostics of various short-duration plasma experiments.
Glow discharge-optical emission spectroscopy for in situ analysis of surfaces in plasmas

Priyanka Arora,Junghyun Cho,Rafael Cervantes,Vincent M. Donnelly

DOI: https://doi.org/10.1116/6.0000373

2020-12-01

Abstract:In situ, real-time characterization of surfaces exposed to plasmas is of great interest. Common chemical analysis methods such as x-ray photoelectron spectroscopy, Auger electron spectroscopy, and secondary ion mass spectroscopy cannot be used. Here, we discuss the use of glow discharge-optical emission spectroscopy for this purpose. A small coupon piece (aluminum coated with yttria in this study) was mounted on an rf-biased electrode and inserted into an opening in the reactor wall. Silicon or SiO2 substrates on a separately rf-biased electrode were etched in an inductively coupled plasma (ICP) of Cl2/Ar/O2 or C4F8/O2, respectively. Pulsed bias was applied to sputter the surface of the coupon piece in the wall at the edge of the ICP, either after etching in an Ar ICP or during etching in the Cl2/Ar/O2 ICP. Optical emission from the region above the coupon surface was collected and spectrally resolved. The difference in intensity between the coupon bias on and off conditions was used to determine what species were present on the surface. A quantification method for converting emission intensities into atomic composition depth profiles is presented.

physics, applied,materials science, coatings & films
Diagnosis of a short-pulse dielectric barrier discharge at atmospheric pressure in helium with hydrogen-methane admixtures

A. V. Nastuta,V. Pohoata,I. Mihaila,I. Topala

DOI: https://doi.org/10.1063/1.5017097

IF: 2.2

2018-04-01

Physics of Plasmas

Abstract:In this study, we present results from electrical, optical, and spectroscopic diagnosis of a short-pulse (250 ns) high-power impulse (up to 11 kW) dielectric barrier discharge at atmospheric pressure running in a helium/helium-hydrogen/helium-hydrogen-methane gas mixture. This plasma source is able to generate up to 20 cm3 of plasma volume, pulsed in kilohertz range. The plasma spatio-temporal dynamics are found to be developed in three distinct phases. All the experimental observations reveal a similar dynamic to medium power microsecond barrier discharges, although the power per pulse and current density are up to two orders of magnitude higher than the case of microsecond barrier discharges. This might open the possibility for new applications in the field of gas or surface processing, and even life science. These devices can be used in laboratory experiments relevant for molecular astrophysics.

physics, fluids & plasmas
A dc plasma source for plasma–material interaction experiments

T S Matlock,D M Goebel,R Conversano,R E Wirz

DOI: https://doi.org/10.1088/0963-0252/23/2/025014

2014-03-24

Plasma Sources Science and Technology

Abstract:A new device has been constructed for the investigation of interactions between engineered materials and a plasma in regimes relevant to electric propulsion and pulsed power devices. A linear plasma source, consisting of a hollow cathode, cylindrical anode, and axial magnetic field, delivers a 3?cm diameter beam to a biased target 70?cm away. The ion energy impacting the surface is controlled by biasing the sample from 0 to 500?V below the local plasma potential. This paper discusses the major aspects of the plasma source design and presents measurements of the plasma parameters achieved to date on argon and xenon. Experiments show that splitting the gas injection between the hollow cathode and the anode region provides control of the discharge voltage to minimize cathode sputtering while providing ion fluxes to the target in excess of 1021?m?2?s?1. Sputtering rate measurements on a non-textured molybdenum sample show close agreement with those established in the literature.

physics, fluids & plasmas
Plasma flow from vacuum surface flashover initiated by 70-kV 20-ns pulses

I F Punanov,R V Emlin,P A Morozov

DOI: https://doi.org/10.1088/1742-6596/1370/1/012017

2019-11-01

Journal of Physics: Conference Series

Abstract:Abstract In this work we study plasma beams generated by vacuum surface flashover discharge. We measured ionic current, velocity of ions at values of discharge current 2.8 kA and 5.5 kA for polymethylmethacrylate (PMMA), polytetrafluorethylene (PTFE) and polyethylene (PE). The aim of the work is to compare parameters of particle flows at different values of discharge current and unchanged voltage. We used generators with coaxial and disk-shaped glycerol-filled pulse-forming lines. Maximum voltage is 70 kV; voltage pulse duration is 20 ns; width of a current pulse first half wave is 30 ns. Average velocity of the ions for all materials is within the range ∼ 100−150 km/s and doesn’t change significantly as the current increases from 2.8 kA to 5.5 kA. Ion current of the beam increase approximately linearly at higher discharge current. We estimate the density of electrons in plasma as a function of distance from the discharge. The applicability of this type of discharge for creating plasma for neutralizing high-power ion beams in inertial confinement fusion facilities is discussed.
Simulation and Experimental Results of Plasma Opening Switch Operation with Inductive and Electron Beam Diode Loads in Different Plasma Regimes

SUNIL KANCHI,Rohit Shukla,Archana Sharma

DOI: https://doi.org/10.1088/1402-4896/ad1d9d

2024-01-13

Physica Scripta

Abstract:This paper reports the experimental results of a plasma opening switch (POS) that operates at hydrogen and carbon plasma regimes confirmed based on the conduction bipolar limit of the plasma species and the availability of plasma species during the conduction based on the density profiles. The generator is the compact capacitor bank developed using the synchronization of four field distortion spark gap switches. The plasma source is coaxial cable plasma guns characterized using the Faraday cup plasma diagnostic. The experimental results are compared with the time domain simulation code in which the POS is represented as the dynamic resistance governed by the physical equations of the bipolar model. The experiments and simulations are compared for inductive load and dynamic load of accelerating gap of 5 mm between the anode and cathode at the load end. From the results, POS can be operated based on the availability of plasma species with proper synchronized triggering between the plasma gun firing and generator firing that can operate at low and high values of currents.

physics, multidisciplinary
The research on atmospheric pressure glow-like discharge plasma

zhijie zhu,guixin zhang,liang liu,yinan li

DOI: https://doi.org/10.1109/PLASMA.2006.1707044

2006-01-01

Abstract:Summary form only given. At present, we develop a plasma chamber to research into the decontamination of plasma at atmospheric pressure. The electrode system consists of the coaxial bar electrode and barrel electrode which is covered with a quartz tube. In order to increase the plasma amount, nine of these electrode systems are installed in parallel. We use a 10-30 kHz high voltage power to excite stable plasma. When plasma is generated, many short-lived and narrow streamers can be observed by a fast-camera. In this paper, we will generalize the regularity of this glow-like discharge at different power source frequency, and demonstrate the relationship among flashover voltage, source frequency and variety of working gas. At the same time, the photographs are provided. As at RF frequencies (>10 MHz), the working gas breaks down at only a few hundreds volts far away from that of the kHz frequencies, we also tend to analyze why kHz and MHz domain have different breakdown volts from microscopic views
Experimental investigation of the characteristics of the plasma flow generated in quasi-stationary plasma accelerator using optical methods

A. A. Kartasheva,K. M. Gutorov,V. L. Podkovyrov,E. A. Muravyeva,K. S. Lukyanov,N. S. Klimov

DOI: https://doi.org/10.1063/5.0198341

IF: 2.2

2024-04-01

Physics of Plasmas

Abstract:The spatial and temporal dependencies of the characteristics of the hydrogen plasma flow generated in quasi-stationary plasma accelerator were investigated. The spatiotemporal structure of discharge radiation in the interelectrode gap was studied. The range of changes in the length of the plasma glowing region in the interelectrode gap during the discharge pulse was determined. The region with bright plasma radiation located in the output face of the accelerator electrode system was observed. The presence of impurities and increased electron concentration values were observed in this region. Fluctuations in the radiation intensity of the plasma flow were detected along the entire length of its propagation. The spatial and temporal characteristics of these fluctuations were determined. The electron concentration values near the output face of the electrode system were obtained by measuring the Stark broadening of the Hβ line. For the first time, the time dependence of the electron concentration of free plasma flow was obtained using two methods simultaneously. The measurements were conducted at a distance, which significantly exceeds the characteristic size of the electrode system and where the influence of interelectrode processes of plasma flow generation is reduced. The first is based on measuring the Stark broadening of Hβ. As a second method, heterodyne interferometry was used.

physics, fluids & plasmas
Experimental research of diffuse bi-directional pulsed dielectric barrier discharge plasma

yang yang,wenchun wang,dezheng yang,li jia,shuai zhang

DOI: https://doi.org/10.1016/j.elstat.2012.05.001

IF: 1.942

2012-01-01

Journal of Electrostatics

Abstract:A bi-directional nanosecond pulsed power supply is employed to generate diffuse dielectric barrier discharge in N2 using needle-plate electrode configuration at atmospheric pressure. Both discharge images and optical emission spectra of diffuse bi-directional nanosecond high-voltage pulsed dielectric barrier discharge are successfully recorded under severe electromagnetic interference. The diffuse performance of the discharge at different electrode gap distances is observed. The effects of pulse peak voltage, pulse repetition rate, electrode gap distance, He addition, and O2 addition on the optical emission spectra are investigated. The main physicochemical processes involved are discussed.
Experimental Study on a Glow Discharge Driven by a Flash Evaporation-Induced Density Gradient From Porous Conductive Liquid Electrodes

Mengmeng Zhang,Zunyi Tian,Bo Peng,Zhongyu Hou

DOI: https://doi.org/10.1109/tps.2024.3369241

IF: 1.368

2024-01-01

IEEE Transactions on Plasma Science

Abstract:The high density of admixture neutral particles beyond air is crucial for regulating the density and species of active products in plasmas. However, high density always leads to breakdown streamers. We engineered a glow discharge plasma source driven by a flash evaporation-induced density gradient from a porous anode or cathode with NaCl solution in a vacuum. The controlled groups with the metal anode and cathode were also conducted. The discharges with the liquid electrodes and controlled groups were carefully analyzed using optical spectrum and imaging methods. For both the discharges with the liquid anode and cathode, the spatial–temporal morphology measurements using intensified charge-coupled device (ICCD) and discharge current monitoring revealed the generation of glow discharge. As the gas density increases from the low-density region near the pumping outlet to the high-density region near the liquid electrode, the light intensity and avalanche diameter decrease smoothly without sharp saltation, presenting a density dependence and independence from the liquid electrode polarity. Furthermore, the spectra of discharges at various axial positions are dominated by the hydrogen Balmer series, OH(A–X) and O I (777.4 nm), resulting from collision reactions of evaporated water molecules. The rotational temperature of OH(A–X) ranges from 573 to 1135 K, lower than the rotational temperature of N $_{2}$ (C–B) in discharges without liquid. This result reveals the heat dissipation effect of the liquid electrode. The electron excitation temperature indicates the creation of nonthermal equilibrium plasmas with an electron density ranging from 0.15 $\times$ 10 $^{14}$ to 2.83 $\times$ 10 $^{14}$ cm $^{-3}$ .

physics, fluids & plasmas
Emission Spectroscopy Diagnosis and Discharge Characteristics Distribution Analysis of High-Frequency, High-Enthalpy Inductive Coupling Plasma Generator

Yue Niu,Weimin Bao,Donglin Liu,Xiaoping Li,Yanming Liu

DOI: https://doi.org/10.1016/j.vacuum.2023.112847

IF: 4

2024-01-01

Vacuum

Abstract:To study the electromagnetic properties through reentry plasma on ground, a large-sized inductive coupled plasma generator is designed to produce a long-duration, large size and high temperature plasma flow in a low-pressure vacuum tank. Among all plasma parameters, the spatial distribution of electron density and electron temperature is of utmost importance for analyzing the electromagnetic scattering properties. In this study, we used the emission spectroscopy diagnosis method to explore the aforementioned parameters at two locations: upflow and downflow of the discharge coil in the plasma generator. Experiments were conducted under various discharge conditions for argon, with the panel power ranging from 28 kW to 85 kW. The results showed that, at the upflow of the discharge coil, the electron temperature at the center was higher than that at the edge, exhibiting an arch-shaped profile. However, at the downflow of the discharge coil, the electron temperature at the center was lower than that at the edge, exhibiting a saddle-shaped profile. The electron density exhibited a completely opposite distribution compared to the electron temperature, with higher values at the edge for upflow and higher values at the center for downflow. By varying the panel power, we observed the similar phenomenon: the electron temperature decreased, while the electron density increased with the increase in power. Finally, brief analysis was provided at the end of the paper. This study offered valuable insights into the transition of plasma distribution in a plasma generator, providing a reference for future research on the propagation of electromagnetic waves in plasma sheaths.
In-situ Plasma Studies using a Direct Current Microplasma in a Scanning Electron Microscope

Lukas Grünewald,Dmitry Chezganov,Robin De Meyer,Andrey Orekhov,Sandra Van Aert,Annemie Bogaerts,Sara Bals,Jo Verbeeck

DOI: https://doi.org/10.1002/admt.202301632

2023-08-29

Abstract:Microplasmas can be used for a wide range of technological applications and to improve our understanding of fundamental physics. Scanning electron microscopy, on the other hand, provides insights into the sample morphology and chemistry of materials from the mm-down to the nm-scale. Combining both would provide direct insight into plasma-sample interactions in real-time and at high spatial resolution. Up till now, very few attempts in this direction have been made, and significant challenges remain. This work presents a stable direct current glow discharge microplasma setup built inside a scanning electron microscope. The experimental setup is capable of real-time in-situ imaging of the sample evolution during plasma operation and it demonstrates localized sputtering and sample oxidation. Further, the experimental parameters such as varying gas mixtures, electrode polarity, and field strength are explored and experimental $V$-$I$ curves under various conditions are provided. These results demonstrate the capabilities of this setup in potential investigations of plasma physics, plasma-surface interactions, and materials science and its practical applications. The presented setup shows the potential to have several technological applications, e.g., to locally modify the sample surface (e.g., local oxidation and ion implantation for nanotechnology applications) on the $\mu$m-scale.

Materials Science,Applied Physics
Spectral diagnosis of underwater microsecond high-current pulsed discharge plasma

Shijie Huang,Yi Liu,Liuxia Li,Fuchang Lin,Chenqian Zeng,Ning Yang,Tianyu Wang,Hongbin Liao

DOI: https://doi.org/10.1088/1361-6463/ad3bc9

2024-04-09

Journal of Physics D Applied Physics

Abstract:Underwater microsecond high-current pulsed discharge can generate powerful shock waves and a significant number of active ions, offering a wide range of applications. To analyze the characteristics of plasma channel formed by the discharge, this study established a comprehensive test platform and conducted spectral diagnosis for underwater high-current pulsed discharge. Considering the randomness of the pulsed arc discharge, the voltage and current waveforms under different discharge cases were measured, and the images and emission spectra of the plasma channel were obtained. The origin of the continuous emission of the initial spectra was analyzed. A spectral fitting algorithm was proposed, which could separate the spectral lines into line emission of Hα and continuous background, and correct the self-absorption. The time-varying characteristics of electron density were obtained under three typical discharge cases, the possible errors caused by baseline shift were considered, and the influencing factors of line broadening were analyzed. Under the test conditions of this study, the electron density of plasma channel was in the order of 1024-1025 m-3.

physics, applied
Filamentary nanosecond surface dielectric barrier discharge. Plasma properties in the filaments

S A Shcherbanev,Ch Ding,S M Starikovskaia,N A Popov

DOI: https://doi.org/10.1088/1361-6595/ab2230

2019-06-25

Plasma Sources Science and Technology

Abstract:Streamer-to-filament transition is a general feature of nanosecond discharges at elevated pressure.The transition is observed in different discharges by different groups: in the nanosecond surfacedielectric barrier discharges (nSDBDs) in a single shot regime at high pressure (2–15 bar), in thepoint-to-point or point-to-plane open electrodes discharges at high repetitive frequency (so-callednanosecond repetitive pulsed discharges, NRPDs) at atmospherics pressure. The present paper containsexperimental analysis of plasma properties in the filamentary nSDBD: the electrical current, thespecific deposited energy, the electron density and the electron temperature were measured for awide range of pressures and voltages. A model explaining plasma properties in filamentary nanoseconddischarges and the role of excited species in streamer-to-filament transition is suggested anddiscussed.

physics, fluids & plasmas
Nanosecond pulsed plasmas: characteristics and opportunities

James Walsh,Wen-Cong Chen,Xi-Ming Zhu,Felipe Iza,Yi-Kang Pu

2012-01-01

Abstract:Low-temperature atmospheric-pressure plasmas are of great importance in many emerging biomedical and materials processing applications; in recent years there has been a growing interest in short-pulsed excitation of such plasmas as a gateway to access highly non-equilibrium discharge chemistry. This contribution employs time-resolved electrical and optical diagnostics in combination with a time-hybrid computational model to uncover the physics behind repetitive short pulsed excitation of atmospheric pressure plasma. It is shown that during the applied voltage pulse the peak dissipated power can exceed 1GW/cm 3 resulting in electron densities approaching 10 17 cm -3
Experiment with a small gas-puff z-pinch plasma device

Luo, C.M.,Li, C.R.,Wang, X.X.,Zheng, Z.X.

DOI: https://doi.org/10.1109/PLASMA.1998.677962

1998-01-01

Abstract:Summary form only given. A small gas-puff Z-pinch plasma device is composed of a capacitor energy storage bank (capacitance=16.3 /spl mu/F, charging voltage=23 kV), field distortion switches, a discharge chamber, vacuum pumping system, fast operation gas valve and diagnostics. The amplitude and the period of discharge current are 230 kA and 9.6 /spl mu/s, respectively. Firstly, a hollow gas shell is produced by injecting gas through an annular nozzle from the fast operation valve. Then initiating the switches, a high pulsed current flows through the gas shell to produce a plasma and form hot pinch spots, from which intense X-rays and ion beams are emitted. A compact Thomson ion energy analyzer is installed inside the gas-puff Z-pinch device. By using the analyzer, up to five clear parabolas produced by argon ion bombardment on CR-39 plastic target have been observed. The parabolas are formed by Ar/sup +/, Ar/sup 2+/, Ar/sup 3+/, Ar/sup 4+/ and Ar/sup 5+/ ions. In our experiments, the range of the energy of Ar/sup +/, Ar/sup 2+/ and Ar/sup 3+/ ions are below 400 keV, 700 keV and 1 MeV, respectively.
Modelling Of Plasma Aerodynamic Actuation Driven By Nanosecond Sdbd Discharge

Yifei Zhu,Yun Wu,Wei Cui,Yinghong Li,Min Jia

DOI: https://doi.org/10.1088/0022-3727/46/35/355205

2013-01-01

Abstract:A two-dimensional air plasma kinetics model (16 species and 44 processes) for nanosecond discharge under atmospheric pressure was developed to reveal the spatial and temporal distribution of discharge characteristics of a surface dielectric barrier discharge (SDBD) actuator. An energy transfer model, including two channels for energy release from external power source to gas, was developed to couple plasma with hydrodynamics directly in the same dimension. The governing equations included the Poisson equation for the electric potential, continuity equations for each species, electron energy equations for electrons taking part in reactions, and Navier-Stokes equations for non-isothermal fluid. The model was validated through current-voltage profile and electron temperature obtained from experiments.Calculations for discharge characteristics as well as the responses of fluid field from tens of nanoseconds to tens of seconds were performed. Results have shown that local air is heated to 1170 K within tens of nanoseconds and then decreases to 310 K at the end of a discharge period. 30% of the total power is transferred from electric field to electrons while only 20% of this energy is then released to gas through quenching processes. 9% of the total energy is released through ion collision. A micro-shock wave is formed and propagates at the speed of sound. High local density gradient and dynamic viscosity induces vortexes which whirl the heated air downstream. The combined effects of heating convection and vortexes in repetitive pulse discharges lead to the formation of a steady jet, in agreement with experimental results.
Discharge Phenomena Of An Atmospheric Pressure Radio-Frequency Capacitive Plasma Source

Jaeyoung Park,I. Henins,H. W. Herrmann,G. S. Selwyn,R. F. Hicks

DOI: https://doi.org/10.1063/1.1323753

IF: 2.877

2001-01-01

Journal of Applied Physics

Abstract:Discharge phenomena of a nonthermal atmospheric pressure plasma source have been studied. An atmospheric pressure plasma jet (APPJ) operates using rf power and produces a stable homogeneous discharge at atmospheric pressure. After breakdown, the APPJ operation is divided into two regimes, a "normal" operating mode when the discharge is stable and homogeneous, and a "failure" mode when the discharge converts into a filamentary arc. Current and voltage (I-V) characteristics and spatially resolved emission intensity profiles have been measured during the normal operating mode. These measurements show that the APPJ produces an alpha (alpha) mode rf capacitive discharge. Based upon a dimensional analysis using the observed I-V characteristics, a rough estimate is made for plasma density of 3 x 10(11) cm(-3) and an electron temperature of 2 eV. In addition, the gas temperature of 120 degreesC has been spectroscopically measured inside the discharge. These plasma parameters indicate that the APPJ shows promise for various materials applications as it can produce substantial amounts of reactive species and avoid thermal damages, while having the advantage of atmospheric pressure operation. (C) 2001 American Institute of Physics.
Spectroscopic analysis of single and multiphase electrical discharge for clean energy conversion

Md Abdullah Hil Baky,Kunpeng Wang,Howard Jemison,David Staack

DOI: https://doi.org/10.1088/1361-6463/ad8760

2024-10-18

Journal of Physics D Applied Physics

Abstract:In this study, we examined non-thermal atmospheric pressure plasma processes operating under varying conditions using different liquid and gaseous hydrocarbon materials. The light emission from the discharges were analyzed through optical emission spectroscopy to comprehend the products generated in different parameter space. The gaseous products from each of these analyses were also collected and analyzed through gas chromatography. Analysis of the optical emission from the discharge and concentration of the gaseous products show a linear trend between emission intensity ratio Hα/C2 and gas concentration ratio H2/C2Hx. Gas temperature and electronic excitation temperature of different experimental conditions were also compared and indicates that spark discharge relates to higher electronic excitation temperature compared to glow discharge of similar medium. Higher electronic excitation temperature leads to generation of different products from spark discharge compared to glow discharge. Glow discharge generates more of the intermediate products. Whereas spark discharge, because of its higher electronic excitation temperature, leads to higher rate of dissociation and therefore generates more of the dissociated products. Glow discharge, for example generates more of OH and H from the moisture present in the carrier gas as impurity, whereas spark discharge would generate more of Hα and O particles further breaking down the OH bonds. Finally, UV-Vis analysis was performed on the liquid products of the discharge and reveals that the photo-centers and the newly generated soot nano particles absorb the UV range lights and some of the visible range light emission mostly up to ~600nm.

physics, applied
In Situ Plasma Studies Using a Direct Current Microplasma in a Scanning Electron Microscope

Lukas Grünewald,Dmitry Chezganov,Robin De Meyer,Andrey Orekhov,Sandra Van Aert,Annemie Bogaerts,Sara Bals,Jo Verbeeck

DOI: https://doi.org/10.1002/admt.202301632

IF: 6.8

2024-02-25

Advanced Materials Technologies

Abstract:Microplasmas are used for technology applications, electron microscopy for micro‐ to nanoscale analyses. Combining them gives new insights into plasma‐sample interactions. This work presents a microplasma setup in a scanning electron microscope. Real‐time imaging during plasma operation and its effect on the sample are shown. This provides new capabilities for plasma and materials science, for example, modification on the micrometer scale. Microplasmas can be used for a wide range of technological applications and to improve the understanding of fundamental physics. Scanning electron microscopy, on the other hand, provides insights into the sample morphology and chemistry of materials from the mm‐ down to the nm‐scale. Combining both would provide direct insight into plasma‐sample interactions in real‐time and at high spatial resolution. Up till now, very few attempts in this direction have been made, and significant challenges remain. This work presents a stable direct current glow discharge microplasma setup built inside a scanning electron microscope. The experimental setup is capable of real‐time in situ imaging of the sample evolution during plasma operation and it demonstrates localized sputtering and sample oxidation. Further, the experimental parameters such as varying gas mixtures, electrode polarity, and field strength are explored and experimental V–I curves under various conditions are provided. These results demonstrate the capabilities of this setup in potential investigations of plasma physics, plasma‐surface interactions, and materials science and its practical applications. The presented setup shows the potential to have several technological applications, for example, to locally modify the sample surface (e.g., local oxidation and ion implantation for nanotechnology applications) on the μm‐scale.

materials science, multidisciplinary

One Hundred Years of Quantum Physics

Novel Gas-Doping Technique for Local Spectroscopic Measurements in Pulsed-Power Systems

Glow discharge-optical emission spectroscopy for in situ analysis of surfaces in plasmas

Diagnosis of a short-pulse dielectric barrier discharge at atmospheric pressure in helium with hydrogen-methane admixtures

A dc plasma source for plasma–material interaction experiments

Plasma flow from vacuum surface flashover initiated by 70-kV 20-ns pulses

Simulation and Experimental Results of Plasma Opening Switch Operation with Inductive and Electron Beam Diode Loads in Different Plasma Regimes

The research on atmospheric pressure glow-like discharge plasma

Experimental investigation of the characteristics of the plasma flow generated in quasi-stationary plasma accelerator using optical methods

Experimental research of diffuse bi-directional pulsed dielectric barrier discharge plasma

Experimental Study on a Glow Discharge Driven by a Flash Evaporation-Induced Density Gradient From Porous Conductive Liquid Electrodes

Emission Spectroscopy Diagnosis and Discharge Characteristics Distribution Analysis of High-Frequency, High-Enthalpy Inductive Coupling Plasma Generator

In-situ Plasma Studies using a Direct Current Microplasma in a Scanning Electron Microscope

Spectral diagnosis of underwater microsecond high-current pulsed discharge plasma

Filamentary nanosecond surface dielectric barrier discharge. Plasma properties in the filaments

Nanosecond pulsed plasmas: characteristics and opportunities

Experiment with a small gas-puff z-pinch plasma device

Modelling Of Plasma Aerodynamic Actuation Driven By Nanosecond Sdbd Discharge

Discharge Phenomena Of An Atmospheric Pressure Radio-Frequency Capacitive Plasma Source

Spectroscopic analysis of single and multiphase electrical discharge for clean energy conversion

In Situ Plasma Studies Using a Direct Current Microplasma in a Scanning Electron Microscope