Abstract:Thin film deposition from vapor with adsorbate diffusion and Ehrlich-Schwoebel (ES) barriers at step edges is studied by kinetic Monte Carlo (KMC) simulations and scaling approaches. Mound coarsening with slope selection is shown at the largest thicknesses, where roughness ( W ) and correlation length ( ξ ) scale in time with exponents β≈n≈0.25 , consistently with theoretical works but contrasting with previous simulations that systematically showed temperature-dependent exponents. At a given film thickness, we show that the mounded morphology is independent of the ES barrier, so that interlayer transport is suppressed, while the temperature increase of W and ξ is consistent with intralayer transport limited by adatom detachment from flat terrace borders. Initial layer-by-layer (LBL) growth occurs above a characteristic temperature that increases with the activation energies of terrace diffusion and of ES barrier, but weakly depends on the external flux. Subsequently, as the surface roughness is near the atom/molecule size, there is rapid roughening where, counterintuitively, larger effective growth exponents ( β>0.5 , suggesting unstable growth) are correlated with longer LBL regimes. Similar LBL-rough transitions were reported in organic film deposition and the model application to diindenoperylene films suggests a large ES barrier ∼0.4eV . In the mound coarsening regime, W/ξ and θ1/2/Wξ converge to constant values dependent on surface diffusion coefficients ( θ is the film thickness). This convergence suggests mound coarsening with slope selection in SnTe films whose effective β is anomalously large, showing how film morphology can be interpreted beyond exponent measurements.

Nonuniversal mound formation in nonequilibrium surface growth

Comment on “nonuniversal Exponents in Interface Growth”

Modeling of nonequilibrium surface growth by a limited mobility model with distributed diffusion length

On the Geometric Principles of Surface Growth

Layer by layer epitaxy in limited mobility nonequilibrium models of surface growth

The influence of the crystal lattice on coarsening in unstable epitaxial growth

Structure below the growing surface

Inelastic Surface Growth

Geometrical Incompatibility Regulated Pattern Selection and Morphological Evolution in Growing Spherical Soft Tissues

Dynamical surface structures in multi-particle-correlated surface growths

Geometrical dynamics of edge-driven surface growth

Noise Reduction and Universality in Limited Mobility Models of Nonequilibrium Growth

Nonlinear elasticity of incompatible surface growth

Nonlinear Evolution Equation for the Stress-Driven Morphological Instability

Coarsening and universality on a growing surface

Stochastic Equation for Conserved Growth in A Restricted Solid-On-Solid Model

Growth Instability of 2D Materials on Non-Euclidean Surfaces

Surfactant-Mediated Surface Growth: Nonequilibrium Theory

Layer-by-layer growth, apparent instability, and mound coarsening in thin film deposition controlled by thermally activated surface diffusion

A Simplified Model for Cavity Growth along a Grain-Boundary by Coupled Surface and Grain-Boundary Diffusion

Diffusion-Dependent Pattern Formation on Crystal Surfaces