Precise Synthesis of Fluorine-containing Block Copolymers via RAFT

Ryuichi Nakatani,Hiroki Takano,Lei Wang,A. Chandra,Yuki Tanaka,Rina Maeda,N. Kihara,S. Minegishi,K. Miyagi,Y. Kasahara,Hironobu Sato,Y. Seino,T. Azuma,C. Ober,T. Hayakawa
DOI: https://doi.org/10.2494/PHOTOPOLYMER.29.705
2016-06-21
Abstract:4. Conclusion The several molecular weights of the high  Si-containing BCP, PMOST-b-PDSS were successfully synthesized using a living anionic polymerization technique. These polymers were characterized and oriented using a neutral XST and TC to provide wellformed lamellar. These materials provide access to smaller structures that those that can be made with PS-PMMA and they have very high development contrast under oxidizing reactive ion etching conditions.
Materials Science
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