Rapid three-dimensional manufacturing of microfluidic structuresusing a scanning laser system

Biao Li,Hui Yu,A. Sharon,Xin Zhang
DOI: https://doi.org/10.1063/1.1793342
2004-09-24
Abstract:This letter introduces a three-dimensional manufacturing approach to the rapid processing of microfluidic structures using a scanning laser system. This technique takes advantage of the nonuniform distribution of laser power along its incident axis. The laser processing perpendicular to the specimen surface is realized by fine-tuning focus levels and laser intensity. A large number of microfluidic components such as cantilevered valves, embedded channels, and other shapes requiring gaps between layers are demonstrated in a single layer. With this process, a class of microstructures with designed-in functionalities can be developed.
Materials Science
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