Mechanical Properties Evolution of Polydimethylsiloxane During Crosslinking Process

Yi Zhao,Xin Zhang
DOI: https://doi.org/10.1557/PROC-975-0975-DD06-07
2006-01-01
Abstract:This paper reports mechanical properties evolution of polydimethylsiloxane (PDMS) during the crosslinking process. In this work, PDMS crosslinking was induced by mixing base prepolymer and curing agent at certain ratios. The liquid prepolymer was spun coated on a silicon wafer, and the curvature change of the wafer was measured continuously using a curvature measurement system. The relationship between the curvature change and typical mechanical properties was investigated using a bilayer model; and the evolution of the properties was derived, as a function of operational parameters. This work is expected to help better understanding of the crosslinking process and provide practical strategies for controlling the mechanical behavior of the resulting polymer structures, especially those for mechanical sensing applications.
Materials Science
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