Virtual phase CCD technology

J. Hynecek
DOI: https://doi.org/10.1109/IEDM.1979.189698
Abstract:In this article a new concept of a single phase CCD, called "virtual phase", is described. Virtual phase technology employs only a single level gate electrode structure. This technology represents a new approach to fabrication of large area CCD devices which have both high performance and high yield. An example of the application of virtual phase technology to the fabrication of a 490 × 328 CCD imager is presented, and several important design and performance parameters are discussed.
Engineering,Materials Science,Physics
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