Abstract:Nonlinear dielectric metasurfaces provide a promising approach to control and manipulate frequency conversion optical processes at the nanoscale, thus facilitating both advances in fundamental research and the development of new practical applications in photonics, lasing, and sensing. Here, we employ symmetry-broken metasurfaces made of centrosymmetric amorphous silicon for resonantly enhanced second- and third-order nonlinear optical response. Exploiting the rich physics of optical quasi-bound states in the continuum and guided mode resonances, we comprehensively study through rigorous numerical calculations the relative contribution of surface and bulk effects to second-harmonic generation (SHG) and the bulk contribution to third-harmonic generation (THG) from the meta-atoms. Next, we experimentally achieve optical resonances with high quality factors, which greatly boosts light-matter interaction, resulting in about 550 times SHG enhancement and nearly 5000-fold increase of THG. A good agreement between theoretical predictions and experimental measurements is observed. To gain deeper insights into the physics of the investigated nonlinear optical processes, we further numerically study the relation between nonlinear emission and the structural asymmetry of the metasurface and reveal that the generated harmonic signals arising from linear sharp resonances are highly dependent on the asymmetry of the meta-atoms. Our work suggests a fruitful strategy to enhance the harmonic generation and effectively control different orders of harmonics in all-dielectric metasurfaces, enabling the development of efficient active photonic nanodevices.

Enhancing second harmonic generation by Q-boosting lossless cavities beyond the time bandwidth limit

Enhanced Second Harmonic Generation Efficiency Via Wavefront Shaping

Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

Efficient Second Harmonic Generation in a Doubly Resonant Photonic Crystal Cavity Based on a Bound State in the Continuum

Doubly Resonant Second-Harmonic Generation of a Vortex Beam from a Bound State in the Continuum

Enhancement of Second-Harmonic Generation Based on the Cascaded Second- and Third-Order Nonlinear Processes in a Multimode Optical Microcavity

Doubly-Resonant Photonic Crystal Cavities for Efficient Second-Harmonic Generation in III–V Semiconductors

Phase Matched Second Harmonic Generation in an On-Chip Lithium Niobate Microresonator Fabricated by Femtosecond Laser

Strongly Enhanced Second Harmonic Generation in a Thin Film Lithium Niobate Heterostructure Cavity

Efficient second harmonic generation from nonlinear one-dimensional meta-grating metasurface under vertically incident pump laser excitation

Broadband and Efficient Second-Harmonic Generation from a Hybrid Dielectric Metasurface/Semiconductor Quantum-Well Structure

Microcavity-Enhanced Surface Nonlinear Optics

Spectrum Broadening of High-Efficiency Second Harmonic Generation in Cascaded Photonic Crystal Microcavities.

Second harmonic generation at a time-varying interface

Boosted Second Harmonic Generation and Cascaded Sum Frequency Generation from a Surface Crystallized Glass Ceramic Microcavity

Third harmonic generation enhancement and wavefront control using a local high-Q metasurface

Nonlinear Frequency Conversion in One Dimensional Lithium Niobate Photonic Crystal Nanocavities

Ultrabroadband Resonant Frequency Doubling on a Chip

Efficient second-harmonic generation of quasi-bound states in the continuum in lithium niobate thin film enhanced by Bloch surface waves

Resonantly Enhanced Second- and Third-Harmonic Generation in Dielectric Nonlinear Metasurfaces

Resonantly Enhanced Second-Harmonic Generation Using III–V Semiconductor All-Dielectric Metasurfaces