Abstract:Fano‐type metamaterials switched by active materials enable the control of light in metaoptics with high sensitivity. However, they exhibit a long‐standing trade‐off between modulation depth and operational bandwidth. Here, the authors circumvent this limitation by proposing a novel Fano‐type metasurface with high contrast of tunability and broadband ultrafast switching, which is extremely appealing for next‐generation flat photonic devices. Miniaturized ultrafast switchable optical components with high efficiency and broadband response are in high demand to the development of optical imaging, sensing, and high‐speed communication. Sharp Fano‐type resonance switched by active materials is one of the key concepts that underpins the control of light in metaoptics with high sensitivity. However, actuating such metasurfaces exhibits a long‐standing trade‐off between modulation depth and operational bandwidth. Here, the limitations are circumvented by theoretical analysis, numerical simulation, and experimental realization of an achromatic Fano metasurface so that a high contrast of tunability with ultrafast switching rate over a broad range of frequency is achieved. By developing the physics of inter‐mode coupling, the Fano metasurface is designed according to a complete phase diagram derived from coupled mode theory. Unlike conventional Fano metasurfaces, the cross‐polarized inter‐metaatoms coupling is discovered as a superior ability of high‐efficiency broadband achromatic polarization conversion. To prove the ultrasensitive nature, a metadevice is constructed by incorporating a thin amorphous Ge layer with a weak photoconductivity perturbation. Transmission modulation over broadband frequency range from 0.6 to 1.1 THz is thus successfully realized, featuring its merits of modulation depth over 90% and On–Off–On switching cycle less than 10 ps.

Ultrafast Q-boosting in semiconductor metasurfaces

Ultrahigh-Q guided mode resonances in an All-dielectric metasurface

Polarization-independent metasurfaces based on bound states in the continuum with high Q-factor and resonance modulation

High-Q All-Dielectric Metasurface: Super and Suppressed Optical Absorption

High-Q filtering and dynamic modulation in all-dielectric metasurfaces induced by quasi-BIC.

An Enhanced High Q-Factor Resonance of Quasi-Bound States in the Continuum With All-Dielectric Metasurface Based on Multilayer Film Structures

Optically Controlled Ultrafast Terahertz Metadevices with Ultralow Pump Threshold (Small 44/2021)

Ultrafast Modulation of a Nonlocal Semiconductor Metasurface under Spatially Selective Optical Pumping

Silicon-based Infrared Metamaterials with Ultra-Sharp Fano Resonances

All-dielectric high-Q dynamically tunable transmissive metasurfaces

High-efficiency optical frequency mixing in an all-dielectric metasurface enabled by multiple bound states in the continuum

Broadband frequency conversion of ultrashort pulses using high-Q metasurface resonators

Enhanced terahertz high-harmonic generation from high-Q quasi-bound states in the continuum empowered by permittivity-broken metasurface

Ultrahigh- Q Metasurface Transparency Band Induced by Collective-Collective Coupling

Dynamic switch between BIC and quasi-BIC supported by the electro-optic metasurface

High Q-factor multiple Fano resonances in all-dielectric metasurface based on quasi-bound states in the continuum

Dielectric‐Metasurface‐Enhanced Kerr Self‐Modulation for Passively Q‐Switching

Million-Q Free Space Meta-Optical Resonator at Visible Wavelengths

Enhancing second harmonic generation by Q-boosting lossless cavities beyond the time bandwidth limit

Intersubband polaritonic metasurfaces for high-contrast ultra-fast power limiting and optical switching

Reassessing Fano Resonance for Broadband, High‐Efficiency, and Ultrafast Terahertz Wave Switching