Automatic detection of quartz glass subsurface defects by laser scattering method based on an ellipsoidal mirror

Gengyang Chen,Tengda Zhang,Weixun Zhang,Rongsheng Lu
DOI: https://doi.org/10.1364/ao.514950
IF: 1.9
2024-03-26
Applied Optics
Abstract:Gengyang Chen, Tengda Zhang, Weixun Zhang, Rongsheng Lu With the improvement of quality requirements of optical components, the detection of subsurface defects of optical components has become a ... [Appl. Opt. 63, 2578-2586 (2024)]
optics
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