Tribological behavior of few-nanometer-thick MoS 2 prepared by low-temperature conversion of atomic layer deposited MoO x films

Tomas F. Babuska,Michael T. Dugger,Karl A. Walczak,Ping Lu,Adam Schwartzberg,Shaul Aloni,Tevye R. Kuykendall,John F. Curry
DOI: https://doi.org/10.1016/j.surfcoat.2023.129884
IF: 4.865
2023-08-07
Surface and Coatings Technology
Abstract:Molybdenum disulfide (MoS 2 ) is a popular lamellar material with desirable properties who's form, and function can vary widely, from particles to monolayer/μm thick films and applications in semiconductors to aerospace lubricants and many more. Physical vapor deposition (PVD) is commonly used to produce dense, conformal micron thick MoS 2 coatings, but lacks the ability to coat more complex geometries due to line-of-sight constraints and typically exhibit amorphous or nanocrystalline microstructures. Atomic layer deposition (ALD) has also been employed to deposit monolayer to 10's of nanometers thick lamellar solids like MoS 2 & WS 2 in transistor, sensors or electrocatalyst applications but not commonly for applications as solid lubricants in aerospace like their PVD counterparts. While recent work has shown that ALD MoS 2 can exhibit favorable microstructures for solid lubricant applications and allows for non-line of sight deposition on complex geometries, it has not been widely adopted due to high deposition temperatures (>500 °C) that can lead to softening of steel substrates. In this work, we show one of the first applications highlighting the use of ultra-thin (5–10 nm) low temperature (~250 °C) MoS 2 coatings as a promising solid lubricant for macroscale mechanical interfaces. Post-deposition chemical conversion of ALD MoO x to MoS 2 by annealing in H 2 S at temperatures ranging from 200 to 550 °C resulted in highly-ordered basally-oriented surface microstructures. The results from this work suggest that converted-ALD MoS 2 coatings can serve as viable solid lubricants for aerospace applications requiring low-temperature processing, including those with complex geometries.
physics, applied,materials science, coatings & films
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