Abstract:The atomic force microscope (AFM) possesses a unique capability for three-dimensional, high-resolution imaging down to the atomic level. It operates without the needs of additional requirements on sample material and environment, making it highly valuable for surface measurements. Recent advancements have further transformed AFM into a precision machining tool, thanks to its exceptional force measurement capability and positioning precision. High-speed AFM (HS-AFM) is a specialized branch of AFM that inherits the advantages of high spatial resolution of typical AFM but with significantly improved time resolution down to the sub-second level. In this article, instead of delving into extensive research progress enabled by HS-AFM in the broad fields of biology, biophysics, and materials science, we narrow our focus to the specific applications in the domain of ultra-precision surface machining and measurement. To the best of the authors’ knowledge, a comprehensive and systematic summary of the contributions that HS-AFM brings to this field is still lacking. This gap could potentially result in an underappreciation of its revolutionary capabilities. In light of this, we start from an overview of the primary operating modes of AFM, followed by a detailed analysis of the challenges that impose limitations on operational speed. Building upon these insights, we summarize solutions that enable high-speed operation in AFM. Furthermore, we explore a range of applications where HS-AFM has demonstrated its transformative capabilities. These include tip-based lithography (TBL), high-throughput metrology, and in-line inspection of nanofabrication processes. Lastly, this article discusses future research directions in HS-AFM, with a dedicated focus on propelling it beyond the boundaries of the laboratory and facilitating its widespread adoption in real-world applications.

Accurate detection of subsurface microcavity by bimodal atomic force microscopy

Measurement of Sub-Surface Microstructures Based on a Developed Ultrasonic Atomic Force Microscopy

Improved Sensitivity for Subsurface Imaging by Contact Resonance Atomic Force Microscopy Using Fano Peaks

Towards High Accuracy Surface Profile Characterization in Atomic Force Microscopy

Multi Scan Mode Atomic Force Microscope with Improved Properties and High Applicability

T0301-2-5 Modifying the Structure of Microwave AFM Probe for Improving the Sensitivity in the Measurement of Electrical Properties

High-speed atomic force microscopy in ultra-precision surface machining and measurement: challenges, solutions and opportunities

A Horizontal Atomic Force Microscope and Its Applications

Study on a novel atomic force microscope for the detection of large-size samples

Multi-mode Dynamic Atomic Force Microscope System

Wide-Range Scanner With Hinge Mechanism And Its Application In Atomic Force Microscope

Hyperelastic Microcantilever AFM: Efficient Detection Mechanism Based on Principal Parametric Resonance

A Large-Sample Atomic Force Microscope Observing in Both Air and Liquid

A wide-range metrology AFM and its applications

Study of AFM-based probe for detecting laser induced surface acoustic wave

Subsurface imaging of flexible circuits via contact resonance atomic force microscopy

Atomic Force Microscope in Liquid with A Specially Designed Probe for Practical Application

Long Range And Accurate Measurement Of Deep Trench Microstructures By A Specialized Scanning Tunneling Microscope

Research of the Atomic Force Microscopy Profilometer System

Enhancement of Sensitivity for the Evaluation of Electrical Properties by Modifying the Nano Structure of Microwave Afm Probe

Determining surface properties with bimodal and multimodal AFM