Abstract:The use of the Silicon-on-Insulator (SOI) platform has been prominent for realizing CMOS-compatible, high-performance photonic integrated circuits (PICs). But in recent years, the silicon-nitride-on-silicon-dioxide (SiN-on-SiO$_2$) platform has garnered increasing interest as an alternative, because of its several beneficial properties over the SOI platform, such as low optical losses, high thermo-optic stability, broader wavelength transparency range, and high tolerance to fabrication-process variations. However, SiN-on-SiO$_2$ based active devices, such as modulators, are scarce and lack in desired performance due to the absence of free-carrier-based activity in the SiN material and the complexity of integrating other active materials with SiN-on-SiO$_2$ platform. This shortcoming hinders the SiN-on-SiO$_2$ platform for realizing active PICs. To address this shortcoming, in this article, we demonstrate a SiN-on-SiO$_2$ microring resonator (MRR) based active modulator. Our designed MRR modulator employs an Indium-Tin-Oxide (ITO)-SiO$_2$-ITO thin-film stack as the active upper cladding and leverages the free-carrier assisted, high-amplitude refractive index change in the ITO films to affect a large electro-refractive optical modulation in the device. Based on the electrostatic, transient, and finite difference time domain (FDTD) simulations, conducted using photonics foundry-validated tools, we show that our modulator achieves 450 pm/V resonance modulation efficiency, $\sim$46.2 GHz 3-dB modulation bandwidth, 18 nm free-spectral range (FSR), 0.24 dB insertion loss, and 8.2 dB extinction ratio for optical on-off-keying (OOK) modulation at 30 Gb/s.

Optimization and Comparative Analysis of Rectangular and Slot Waveguide based Symmetric Ring and Racetrack Resonators for SoI Photonic Integrated Filters

Design and Analysis of Ingaas Pin Photodetectors Integrated on Silicon-On-Insulator Racetrack Resonators

Substrate-Integrated Waveguide Bandpass Filters with Planar Resonators for System-on-Package

Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Novel Bandpass Filters by Using Cavity-Loaded Dielectric Resonators in A Substrate Integrated Waveguide

Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

Novel structure of passive ring waveguide resonator on silicon substrate

Integrated Broadband Filter with Sharp Transition Edges Based on SiN and SiON Composite Waveguide Coupler

Optimal Design of Ring Resonator in Silica Optical Waveguide

SOI Multi-ring Cascade Optic Resonator Filters

Integrated optical ring resonator based comb filter in silicon-on-insulator with through-to-add port feedback path showing larger free spectral range

Enhanced Q-factor and effective length silicon photonics filter utilizing nested ring resonators

Numerical Investigation of Nanoresonator Based Ultra Narrow-Band Photonic Filters

Design optimization of band-pass filter based on parity-time symmetry coupled-resonant

Design and Characterization of Q-enhanced Silicon Nitride Racetrack Micro-Resonators

Design of Photonic Filters based on Integrated Coupled Sagnac Loop Reflectors

Ultra-narrow Passband-Tunable Filter Based on a High-Q Silicon Racetrack Resonator.

Optimisation Design Of Coupling Region Based On Soi Micro-Ring Resonator

Fine-Resolution Silicon Photonic Wavelength-Selective Switch Using Hybrid Multimode Racetrack Resonators

A Silicon Nitride Microring Modulator for High-Performance Photonic Integrated Circuits

Parametric Optimization of Hybrid Plasmonic Waveguide-Based SOI Ring Resonator Refractive Index Sensor