A High-Voltage Generator and Multiplexer for Electrostatic Actuation in Programmable Matter

Yimai Peng,Gordy Carichner,Yejoong Kim,Li-Yu Chen,Rémy Tribhout,Benoît Piranda,Julien Bourgeois,David Blaauw,Dennis Sylvester
DOI: https://doi.org/10.1109/jssc.2022.3230927
IF: 5.4
2023-03-29
IEEE Journal of Solid-State Circuits
Abstract:Programmable matter (PM) consists of tiny, mm-scale quasi-spherical robots that can be combined and programmed to form any arbitrary 3-D shape autonomously. While PM enables instant structural visualization and opens up a host of industrial and artistic applications, it also raises significant challenges in micro-robot control, communication, and actuation that are difficult to support with existing system-on-chip (SoC) designs. This article presents a high-voltage-generation-and-multiplexer (HVGM) chip specially designed for electrostatic actuation of micro-robots for applications such as PM. The HVGM individually controls 12 pairs of electrodes using a positive and negative charge pump and mux-structure, consuming only 286 nW power when switching a 10 pF electrode at 155 V/s, and producing a differential voltage of 103 V (29 voltage gain from 3.6 V) in measurement. We also show a complete micro-system of stacked dies, measuring 3 1.4 1.1 mm, including the HVGM, a processor, radio, and harvester that achieves energy-autonomous operation, and can be integrated into a micro-robot "Catom" via a flexible PCB.
engineering, electrical & electronic
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