Abstract:Scalable and low-cost manufacturing of broadband absorbers for use in the long-wave infrared region are of enormous importance in various applications, such as infrared thermal imaging, radiative cooling, thermal photovoltaics and infrared sensor. In recent years, a plethora of broadband absorption metasurfaces made of metal nano-resonators with plasmon resonance have been synthesized. Still, their disadvantages in terms of complex structure, production equipment, and fabrication throughput, limit their future commercial applications. Here, we propose and experimentally demonstrate a broadband large-area all-dielectric metasurface absorber comprised of silicon (Si) arrys of square resonators and a silicon nitride (Si3N4) film in the long-wave infrared region. The multiple Mie resonance modes generated in a single-size Si resonator are utilized to enhance the absorption of the Si3N4 film to achieve broadband absorption. At the same time, the transversal optical (TO) phonon resonance of Si3N4 and the Si resonator's magnetic dipole resonance are coupled to achieve a resonator size-insensitive absorption peak. The metasurface absorber prepared by using maskless laser direct writing technology displays an average absorption of 90.36% and a peak absorption of 97.55% in the infrared region of 8 to 14 µm, and still maintains an average absorption of 88.27% at a inciedent angle of 40°. The experimentally prepared 2 cm × 3 cm patterned metasurface absorber by markless laser direct writing lithography (MLDWL) exhibits spatially selective absorption and the thermal imaging of the sample shows that the maximum temperature difference of 17.3 °C can exist at the boundary.

Broadband near infrared all-dielectric metasurface absorber

Omnidirectional, Thin Metasurface Exhibiting Selective Absorption for Un-Polarized Broadband Incidence

Broadband Metasurface Absorber Based on Metal-dielectric Nanodisks

Near‐Infrared Super‐Absorbing All‐Dielectric Metasurface Based on Single‐Layer Germanium Nanostructures

Broadband Metamaterial Absorber with an In-Band Metasurface Function.

Multi-narrowband absorber based on subwavelength grating structure

High-Q All-Dielectric Metasurface: Super and Suppressed Optical Absorption

All-Dielectric Metasurfaces: Near-Infrared Super-Absorbing All-Dielectric Metasurface Based on Single-Layer Germanium Nanostructures (Laser Photonics Rev. 12(9)/2018)

Near-infrared free carrier absorption enhancement of heavily doped silicon in all-dielectric metasurface

Broadband Terahertz Silicon Membrane Metasurface Absorber

Large-area long-wave infrared broadband all-dielectric metasurface absorber based on markless laser direct writing lithography

Design of Broadband Metamaterial Absorbers in the Near‐Infrared Region

Broadband Perfect Optical Absorption by Coupled Semiconductor Resonator-Based All-Dielectric Metasurface

Broadened Angle-Insensitive Near-Perfect Absorber Based on Mie Resonances in Amorphous Silicon Metasurface

High-Q Absorption in All-Dielectric Photonics Assisted by Metamirrors

Ultra-wideband THz/IR Metamaterial Absorber based on Doped Silicon

Near-Infrared Broadband Absorber with Film-Coupled Multilayer Nanorods

High-quality factor mid-infrared absorber based on all-dielectric metasurfaces

Mid-infrared bimodal wide metamaterial absorber based on double-layer silicon nitride structure

Broadband long wavelength infrared metamaterial absorbers

Visible-mid infrared ultra-broadband and wide-angle metamaterial perfect absorber based on cermet films with nano-cone structure