Liquid-Metal-Printed Ultrathin Oxides for Atomically Smooth 2D Material Heterostructures
Yiyu Zhang,Dasari Venkatakrishnarao,Michel Bosman,Wei Fu,Sarthak Das,Fabio Bussolotti,Rainer Lee,Siew Lang Teo,Ding Huang,Ivan Verzhbitskiy,Zhuojun Jiang,Zhuoling Jiang,Jianwei Chai,Shi Wun Tong,Zi-En Ooi,Calvin Pei Yu Wong,Yee Sin Ang,Kuan Eng Johnson Goh,Chit Siong Lau
DOI: https://doi.org/10.1021/acsnano.3c02128
IF: 17.1
2023-04-07
ACS Nano
Abstract:Two-dimensional (2D) semiconductors are promising channel materials for continued downscaling of complementary metal-oxide-semiconductor (CMOS) logic circuits. However, their full potential continues to be limited by a lack of scalable high-k dielectrics that can achieve atomically smooth interfaces, small equivalent oxide thicknesses (EOTs), excellent gate control, and low leakage currents. Here, large-area liquid-metal-printed ultrathin Ga(2)O(3) dielectrics for 2D electronics and...
materials science, multidisciplinary,chemistry, physical,nanoscience & nanotechnology