Stable Metal-Insulator-Metal Electron Source Based on Porous Alumina

Tao Xue,Yun Zhang,Xiao Wang,Shuya Ning,Ming Jiang
DOI: https://doi.org/10.1109/led.2022.3175203
IF: 4.8157
2022-07-02
IEEE Electron Device Letters
Abstract:A Metal-Insulator-Metal electron source containing porous or barrier-type alumina was fabricated. The impacts of rapid thermal processing on electron emission characteristics were studied. The electron source based on porous type alumina film has good heat dissipation and generates more stable conducting paths due to its unique porous structure, which is less prone to negative resistance effect. Additionally, A self-planarization effect occurs at the top electrode after rapid heat treatment, which enables more electrons to escape. As a result, the device's electron emission current and stability have been significantly increased.
engineering, electrical & electronic
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