Large-range displacement measurement in narrow space scenarios: fiber microprobe sensor with subnanometer accuracy

Chen Zhang,Yisi Dong,Pengcheng Hu,Haijin Fu,Hongxing Yang,Ruitao Yang,Yongkang Dong,Limin Zou,Jiubin Tan
DOI: https://doi.org/10.1364/prj.525667
IF: 7.6
2024-08-21
Photonics Research
Abstract:Chen Zhang, Yisi Dong, Pengcheng Hu, Haijin Fu, Hongxing Yang, Ruitao Yang, Yongkang Dong, Limin Zou, Jiubin Tan The embedded ultra-precision displacement measurement is of great interest in developing high-end equipment as well as precision metrology. ... [Photon. Res. 12, 1877-1889 (2024)]
optics
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