Versatile Landscape of Low- k Polyimide: Theories, Synthesis, Synergistic Properties, and Industrial Integration

Xiaodi Dong,Baoquan Wan,Jun-Wei Zha
DOI: https://doi.org/10.1021/acs.chemrev.3c00802
IF: 62.1
2024-06-08
Chemical Reviews
Abstract:The development of microelectronics and large-scale intelligence nowadays promotes the integration, miniaturization, and multifunctionality of electronic and devices but also leads to the increment of signal transmission delays, crosstalk, and energy consumption. The exploitation of materials with low permittivity (low-k) is crucial for realizing innovations in microelectronics. However, due to the high permittivity of conventional interlayer dielectric material (k ∼ 4.0), it is difficult to...
chemistry, multidisciplinary
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