Effect of target poisoning ratios on the fabrication of titanium oxide coatings using superimposed high power impulse and medium frequency magnetron sputtering

Bih-Show Lou,Wei-Ting Chen,Wahyu Diyatmika,Jong-Hong Lu,Chen-Te Chang,Po-Wen Chen,Jyh-Wei Lee
DOI: https://doi.org/10.1016/j.surfcoat.2021.127430
IF: 4.865
2021-09-01
Surface and Coatings Technology
Abstract:<p>Five titanium oxide <u>coatings</u> with different O/Ti ratios were grown by a superimposed high power impulse magnetron sputtering (HiPIMS) and medium frequency (MF) coating system utilizing a plasma emission monitoring feedback control. The peak power density of HiPIMS increased from 517.6 to 658.5 W/cm<sup>2</sup> and the O/Ti ratio increased from 1.4 to 2.3 as the target poisoning ratio increased from 10% to 90%, whereas the deposition rate decreased with increasing target poisoning ratios. A pure TiO phase gradually transferred to a mixture phase of anatase and rutile TiO<sub>2</sub> as the target poisoning ratio increased. The amount of anatase TiO<sub>2</sub> increased with increasing target poisoning ratios and reached almost a pure anatase phase as the target poisoning ratio was 90%. The highest hardness of 16.4 GPa and the best corrosion resistance were found for the coating with pure TiO phase grown at 10% target poisoning ratio (TB10). The hardness decreased gradually as the structure changed from a pure TiO phase to the rutile and anatase mixed phases. A low hardness of 5.8 GPa and a poor corrosion resistance were obtained for the anatase rich TB90 due to its microstructure defects. Good adhesion and wear resistance were achieved for coatings deposited at 70% and 90% target poisoning ratios (TB70, TB90) . Among these five coatings, TB70 coating exhibited a hardness of 12.6 GPa, good wear resistance, adequate adhesion, and fair corrosion resistance, which can be used as a functional coating with good protection property.</p>
physics, applied,materials science, coatings & films
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