Abstract:Strong field confinement, long-lifetime resonances, and slow-light effects suggest that metasurfaces are a promising tool for nonlinear optical applications. These nanostructured devices have been utilized for relatively high efficiency solid-state high-harmonic generation platforms, four-wave mixing, and Raman scattering experiments, among others. Here, we report the first alldielectric metasurface to enhance harmonic generation from a surrounding gas, achieving as much as a factor of 45 increase in the overall yield for Argon atoms. When compared to metal nanostructures, dielectrics are more robust against damage for high power applications such as those using atomic gases. We employ dimerized highcontrast gratings fabricated in silicon-on-insulator that support bound states in the continuum, a resonance feature accessible in broken-symmetry planar devices. Our 1D gratings maintain large mode volumes, overcoming one of the more severe limitations of earlier device designs and greatly contributing to enhanced third- and fifth-harmonic generation. The interaction lengths that can be achieved are also significantly greater than the 10’s of nm to which earlier solid-state designs were restricted. We perform finite-difference time-domain simulations to fully characterize the wavelength, linewidth, mode profile, and polarization dependence of the resonances. Our experiments confirm these predictions and are consistent with other nonlinear optical properties. The tunable wavelength dependence and quality factor control we demonstrate in these devices make them an attractive tool for the next generation of high-harmonic sources, which are anticipated to be pumped at longer wavelengths and with lower peak power, higher repetition rate lasers.

Enhanced harmonic generation in gases using an all-dielectric metasurface

Enhanced High-Harmonic Generation from an All-Dielectric Metasurface

Resonantly Enhanced Second- and Third-Harmonic Generation in Dielectric Nonlinear Metasurfaces

Resonantly Enhanced Second-Harmonic Generation Using III–V Semiconductor All-Dielectric Metasurfaces

Resonance-enhanced Generation of Optical Harmonics from Dielectric Metasurfaces

High harmonic generation from a subwavelength dielectric resonator

Generation of even and odd high harmonics in resonant metasurfaces using single and multiple ultra-intense laser pulses

Ultra-broadband Enhancement of Nonlinear Optical Processes from Randomly Patterned Super Absorbing Metasurfaces

Enhanced Solid-State High-Harmonic Generation From A Silicon Metasurface

Nonlinear van der Waals metasurfaces with resonantly enhanced light generation

Tunable unidirectional nonlinear emission from transition-metal-dichalcogenide metasurfaces

Nonlinear Fano-Resonant Dielectric Metasurfaces.

Nonlinear dielectric geometric-phase metasurface with simultaneous structure and lattice symmetry design

Efficient Second-Harmonic Generation from Dielectric Inter-subband Polaritonic Metasurfaces Coupled to Lattice Resonance

Highly Efficient Second Harmonic Generation Assisted by the Quasi-Bound States in the Continuum from AlGaAs Meta-Gratings

Enhanced light emission by magnetic and electric resonances in dielectric metasurfaces

Enhanced High Harmonic and Terahertz Generation from LiNbO3 Metasurface

Dual quasi-bound state enhanced second harmonic generation in lithium niobate metasurfaces

Artificial Generation of High Harmonics Via Nonrelativistic Thomson Scattering in Metamaterial

Enhanced third harmonic generation with graphene metasurfaces

Second harmonic generation from Chalcogenide metasurfaces via mode coupling engineering