Abstract:Strong field confinement, long-lifetime resonances, and slow-light effects suggest that metasurfaces are a promising tool for nonlinear optical applications. These nanostructured devices have been utilized for relatively high efficiency solid-state high-harmonic generation platforms, four-wave mixing, and Raman scattering experiments, among others. Here, we report the first alldielectric metasurface to enhance harmonic generation from a surrounding gas, achieving as much as a factor of 45 increase in the overall yield for Argon atoms. When compared to metal nanostructures, dielectrics are more robust against damage for high power applications such as those using atomic gases. We employ dimerized highcontrast gratings fabricated in silicon-on-insulator that support bound states in the continuum, a resonance feature accessible in broken-symmetry planar devices. Our 1D gratings maintain large mode volumes, overcoming one of the more severe limitations of earlier device designs and greatly contributing to enhanced third- and fifth-harmonic generation. The interaction lengths that can be achieved are also significantly greater than the 10’s of nm to which earlier solid-state designs were restricted. We perform finite-difference time-domain simulations to fully characterize the wavelength, linewidth, mode profile, and polarization dependence of the resonances. Our experiments confirm these predictions and are consistent with other nonlinear optical properties. The tunable wavelength dependence and quality factor control we demonstrate in these devices make them an attractive tool for the next generation of high-harmonic sources, which are anticipated to be pumped at longer wavelengths and with lower peak power, higher repetition rate lasers.

Generation of even and odd high harmonics in resonant metasurfaces using single and multiple ultra-intense laser pulses

High-order harmonic generation from a thin film crystal perturbed by a quasi-static terahertz field

Enhanced High-Harmonic Generation from an All-Dielectric Metasurface

Enhanced harmonic generation in gases using an all-dielectric metasurface

Nonperturbative Generation of Harmonics by Nanometer-Scale Localized Electronic States on the Surface of Bulk Materials and Nano-Films

Generation of High-Order Harmonics by Gallium Ions in Intense Laser Pulse

High-harmonic generation from subwavelength silicon films

High-order harmonic generation in a strongly overdriven regime

Artificial Generation of High Harmonics Via Nonrelativistic Thomson Scattering in Metamaterial

High harmonic generation from a subwavelength dielectric resonator

Wide-bandgap optical materials for high-harmonics generation at the nanoscale

Even-order optical harmonics generated from centrosymmetric-material metasurfaces

Generation of high-order harmonics with tunable photon energy and spectral width using double pulses

Efficient, self-phase matched, narrow-band, engineered shape, tunable high-order harmonic generation based on femtosecond dynamic grating

Generation, Manipulation, and Application of High-Order Harmonics in Solids

High-Harmonic Generation from Resonant Dielectric Metasurfaces Empowered by Bound States in the Continuum

High Harmonic Generation in Solids: Particle and Wave Perspectives

Resonantly Enhanced Second-Harmonic Generation Using III–V Semiconductor All-Dielectric Metasurfaces

Beating absorption in solid-state high harmonics

Spectral tuning of high-harmonic generation with resonance-gradient metasurfaces

High-harmonic Generation from an Epsilon-Near-zero Material (conference Presentation)