Two-frame random phase-shifting interferometry immune to the influence of tilted phase-shift

Hangying Zhang,Weihao Zhang,Kai Meng,Peihuang Lou

DOI: https://doi.org/10.1364/ol.535430

IF: 3.6

2024-10-02

Optics Letters

Abstract:Hangying Zhang, Weihao Zhang, Kai Meng, Peihuang Lou To expand the reliability of interferometry technology, this paper proposes a random two-frame algorithm with high accuracy, high ... [Opt. Lett. 49, 5615-5618 (2024)]

optics

What problem does this paper attempt to address?

Phase Detection from Two Phase-Shifting Interferograms

Yongjian Zhu,Liren Liu,Yanan Zhi,Zhu Luan,De'an Liu

DOI: https://doi.org/10.1117/12.731957

2007-01-01

Abstract:Phase detection is one of the most important processing steps in optical phase-shifting interferometry. It aims to reconstruct the phase field of wavefront from the interferogram. To solve this problem, many algorithms of phase detection have been proposed these years. Here, A FFT-based two-step phase shifting (TPS) algorithm is described in detail and implemented by use of experimental interferograms. This algorithm has been proposed to solve the TPS problem with random phase shift except π. By comparison with the Visibility-Function-based TPS algorithm, it proves that the FFT-based algorithm has obvious advantages in phase extracting. Meanwhile, we present a π-phase-shift supplement to the TPS algorithm, which combines the two interferograms and demodulates the phase map from a combined interferogram. So combining this quasi-two-step method and FFT-based one, one could really implement the TPS with random phase shift. Thereafter, we design an optical setup of two-channel TPS interferometer with random phase shift, which could capture the two interferograms simultaneously. At the same time, we propose a fringe-variable Jamin interferometer to detect reversed domain of ferroelectric crystal in real time. It could realize the two-step phase shifting with π radian.
Fast and Robust Two-Frame Random Phase-Shifting Interferometry Without Pre-Filtering.

Hangying Zhang,Feng Yang,Hong Zhao,Liangcai Cao

DOI: https://doi.org/10.1364/oe.462023

IF: 3.8

2022-01-01

Optics Express

Abstract:To obtain higher phase accuracy with less computation time in phase-shifting interferometry, a random phase-shifting algorithm based on principal component analysis and least squares iteration (PCA&LSI) is proposed. The algorithm does not require pre-filtering, and only requires two-frame phase-shifted interferograms and less computation time to obtain a relatively accurate phase distribution. This method can still extract the phase with high precision when there are few fringes in the interferogram. Moreover, it eliminates the limitation that the PCA algorithm needs more than three frames of interferograms with uniform phase shift distribution to accurately extract the phase. Numerical simulations and experiments confirm that the method is suitable for complex situations with different fluctuations in background intensity and modulation amplitude. And it can still achieve accurate phase extraction compared with other methods under different noise conditions.
Two-frame advanced iterative self-tuning algorithm for accurate phase retrieval

Zhouxuan He,Hubing Du,Feifei Gu,Bingqing Hu,Feng Wang,Zixin Zhao,Gaopeng Zhang

DOI: https://doi.org/10.1016/j.optlaseng.2023.107715

IF: 5.666

2023-06-26

Optics and Lasers in Engineering

Abstract:Two-shot random phase-shifting interferometry has been actively investigated and improved owing to more demanding requirements in investigating dynamic phenomena or sensing some transient events. Given the background intensity and phase step knowledge, a reconstruction algorithm can be used to recover a complex-valued signal from intensity-only measurements. Most algorithms assume the background intensity and modulation amplitude in a frame of interferogram are constant variables; however, in realistic systems, they vary laterally and axially across the field of view. The model can be used but often appears less precise. In this work, we propose an approach that leverages the iterative method to cope with spatially varying background intensity and modulation amplitude. Our approach, termed the two-frame advanced iterative self-tuning algorithm, uses the spatial mean algorithm paired with an iterative procedure to search the phase step from two captured fringe patterns. It represents a novel approach to reliable and practical two-step phase-shifting interferometry without pre-filtering due to the cancelation of simultaneously obtaining the phase shifts and measured phase through iterative operation in the spatial–temporal domain. Experimental results obtained using the proposed method indicate that it is a simple and robust solution for phase extraction from a two-frame unknown phase shift fringe pattern with spatially varying background intensity and modulation amplitude.

optics
Accurate two-step random phase retrieval approach without pre-filtering based on hyper ellipse fitting

Ziwen Li,Hubing Du,LEIJIE FENG,feifei gu,Yanjie Li,Qian Zhu,Pengfei Wei,Gaopeng Zhang

DOI: https://doi.org/10.1364/oe.533121

IF: 3.8

2024-08-22

Optics Express

Abstract:Ziwen Li, Hubing Du, Leijie Feng, Feifei Gu, Yanjie Li, Qian Zhu, Pengfei Wei, Gaopeng Zhang In this work, we propose a hyper ellipse fitting-based high-precision random two-frame phase shifting algorithm to improve the accuracy of ... [Opt. Express 32, 31984-32001 (2024)]

optics
Discussions about FFT-based two-step phase-shifting algorithm

Yongjian Zhu,Liren Liu,Zhu Luan,Jianfeng Sun

DOI: https://doi.org/10.1016/j.ijleo.2006.12.010

IF: 3.1

2008-01-01

Optik

Abstract:An FFT-based two-step phase-shifting (TPS) algorithm is described in detail and implemented by use of experimental interferograms. This algorithm has been proposed to solve the TPS problem with random phase shift except π. By comparison with the visibility-function-based TPS algorithm, it proves that the FFT-based algorithm has obvious advantages in phase extracting. Meanwhile, we present a π-phase-shift supplement to the TPS algorithm, which combines the two interferograms and demodulates the phase map by locating the extrema of the combined fringes after removing the respective backgrounds. So combining this method and FFT-based one, one could really implement the TPS with random phase shift. Whereafter, we systematically compare the TPS with single-interferogram analysis algorithm and conventional three-step phase-shifting one. The results demonstrate that the FFT-based TPS algorithm has a satisfactory accuracy. At last, based on the polarizing interferometry, a schematic setup of two-channel TPS interferometer with random phase shift is suggested to implement the simultaneous collection of interferograms.
Phase Error Correction by &Lt;inline-Formula><math Display="inline" Overflow="scroll"><mi>π</mi></math></inline-Formula>-shift Odd-Step Fringe Projection and Speckle Filtering in Phase Measuring Profilometry

Shuangqing Wu,Sanyuan Zhang,Yin Zhang,Xiuzi Ye

DOI: https://doi.org/10.1117/1.3407430

IF: 1.3

2010-01-01

Optical Engineering

Abstract:Phase measuring profilometry based on structured illumination with a digital projector has great flexibility. However, the phase error introduced by the gamma nonlinearity of the projector and the presence of speckle noise inevitably decreases the accuracy and resolution of the measurement. This paper presents a new phase error correction algorithm by which the odd-step fringe projection is done twice with an initial phase shift of π between, and the two captured deformed fringe images are then digitally subtracted. The speckle noise is further suppressed by applying a sine-cosine median filter. Both theoretical analysis and experimental results showed that this algorithm is effective and fast.
Influence of Alignment Error and Random Noise on Interferometry Flat Sub-Aperture Stitching

Wantao Deng,Kaiwei Wang,Jinchun Zhang

DOI: https://doi.org/10.1117/12.966324

2012-01-01

Abstract:In the flat sub-aperture stitching test, the dominant e error comes from two dimensional translation stage that carries the flat under test, which contains tilt and position error i.e., the alignment error. In order to analyze the influence of alignment error on stitching precision, we use Zemax optical software to simulate a system to detect the phase of each sub-aperture of measured flat and add tilt and position errors and random noise to sub-apertures. The simulation model was utilized in this paper to evaluate the mechanical precision of the translation stage in order to meet a required stitching precision of 1/1000 lambda.
High-accuracy Three-dimensional Measurement by Improving the Asymmetry of Dithered Patterns

Wang Ting,Lin Bin,Zhang Wanzhen,Chen Bo

DOI: https://doi.org/10.1088/1742-6596/1229/1/012029

2019-01-01

Abstract:The previously proposed dithering defocusing technology performs well for three-dimensional (3D) measurement when stripes are relatively wide, yet suffers if stripes are narrow. This paper finds two asymmetries in dithered patterns generated by the Sierra Lite dithering algorithm and verifies the longitudinal fringes are more advantageous for phase-shifting technique over transverse fringes. Furthermore, this paper proposes an algorithm with a meandering scan. In each pattern, the pixels of odd lines are scanned from left to right while the even lines are scanned from right to left. The proposed method avoids the quantization errors propagating in a specific direction and greatly improves the symmetry of longitudinal fringes. Both simulation and experimental results have shown this method can effectively improve accuracy of 3D measurement especially for narrow stripes.
Phase-tilting interferometry for optical testing.

Jianxin Li,Rihong Zhu,Lei Chen,Yong He

DOI: https://doi.org/10.1364/OL.38.002838

IF: 3.6

2013-01-01

Optics Letters

Abstract:Phase-tilting interferometry for optical testing is proposed to retrieve the phase from interferograms with random phase tilts. The Radon transform is used to extract the tilted phase plane, and the phase distribution is retrieved by the least squares method. The proposed method has been applied to simulated and experimental interferograms, obtaining satisfactory results. The proposed method has high accuracy and good robustness, and it can be used for interferometric measurements in environmental vibrations. Additionally, it can be used for interferometers without a phase shifter to achieve high-precision analysis. (C) 2013 Optical Society of America
On-line Three-Dimensional Inspection Using Randomly Phase-Shifting Fringe Based on Least-Square Iteration

WU Ying-chun,CAO Yi-ping,XIAO Yan-shan

DOI: https://doi.org/10.3788/ope.20142205.1347

2014-01-01

Abstract:An on-line Phase Measuring Profilometry(PMP)based on least-square iteration was proposed to simplify the complexities of system installment and to avoid the influence of additional phase ?shifting caused by the non-parallelism between grating lines and object's displacement in the PMP based on synchronous detection.In measurement processing,the sinusoidal grating with arbitrary grid line direction was projected onto an object,and a CCD was used to capture the deformed fringe patterns.After pixel matching,fringe patterns were used to evaluate the phase distribution.The phase-shifting was determined as arbitrary values by both projection system and object's displacement.Finally,the least-square iteration was used to calculate the phases.The experiment result shows when the grating line directions on the reference plane are changed,the measurement resultsare stable,and the root-mean-square error is less than 0.169 9mm.It concludes that the proposed method relaxes the restriction of the spatial location of measurement equipment,increases the measurement flexibility and makes the PMP more applicable.
Fast and precise single-frame phase demodulation interferometry

Hangying Zhang,Kai Meng,Peihuang Lou

DOI: https://doi.org/10.1364/oe.525359

IF: 3.8

2024-05-23

Optics Express

Abstract:Hangying Zhang, Kai Meng, Peihuang Lou To achieve real-time phase detection, this paper presents a fast and precise spatial carrier phase-shifting interferometry based on the ... [Opt. Express 32, 21017-21027 (2024)]

optics
Fast and Accurate Two-Frame Phase Demodulation Algorithm with Statistical Averaging

Hangying Zhang,Hong Zhao,Zixin Zhao,Chen Fan

DOI: https://doi.org/10.1088/1361-6501/ab796d

IF: 2.398

2020-01-01

Measurement Science and Technology

Abstract:This paper introduces a fast, compact phase demodulation method for two-frame random phase-shifting interferometry. A set of sine and cosine components is obtained with the addition and subtraction of two pre-filtered fringe patterns. Then, using the properties of the trigonometric function, the amount of phase shift is obtained by statistically averaging all the pixels. Finally, the phase distribution of the interferogram is obtained by the arctangent operation. The proposed algorithm has a very low computation burden and does not require iteration, optimization, and orthogonalization while ensuring measurement accuracy; as a result, the consumed time is very short. Simulation and experimental results are presented to verify the accuracy and efficiency of the proposed method.
Five-Frame Phase-Shifting Algorithm Based On The Immunity To Phase-Shifting Error

Fei Zhang,Bing Li,Zhuangde Jiang,Zhaomin Wang

DOI: https://doi.org/10.1109/SOPO.2009.5230282

2009-01-01

Abstract:This paper designs a kind of phase shifting algorithm of white light Interferometry technology, aiming at high precision measurement of MEMS. Through analyzing the error source of phase shifting in theory, five-frame phase-shifting algorithm based on the immunity to phase-shifting error is presented. In the proposed algorithm, phase shifting distance is set to be lambda/8 per step, and the interference fringe phase is changed pi/2 each time. Measurement accuracy of the algorithm has been verified, through the measurement of the standard bench height which has been authenticated by United Kingdom Accreditation Service. The experimental results show that the proposed algorithm can eliminate the transposition error factor and improve the measurement accuracy. Meanwhile, it also has more powerful effect on noise inhibition, and the measurement repeatability is in sub-nanometer.
Design of algorithms for phase shifting interferometry using self-convolution of the rectangle window

Zhenguang Shi,Jian Zhang,Yongxin Sui,Ji Peng,Feng Yan,Huaijiang Yang

DOI: https://doi.org/10.1364/OE.19.014671

IF: 3.8

2011-01-01

Optics Express

Abstract:The objective of this paper is to design phase shifting algorithms error-resistant to the nonlinearity of phase-shift error and photoelectric detector simultaneously. An effective construction approach is proposed based on self-convolution of the rectangle window to design algorithms with perfect zero point distribution, according to the fact that the error-resistant capability is entirely determined by the number and order of zero points of Fourier transform of the related window function. Theoretical analysis and numerical simulations compared to the commercial 13-frame algorithm demonstrate the validity of the approach to design algorithms with enhanced error-resistant capability not only to CCD-caused harmonics but also to PZT ramping nonlinearity. (C) 2011 Optical Society of America
Two-shot Point-Diffraction Interferometer with an Unknown Phase Shift

Fuzhong Bai,Zhen Liu,Xiaoyan Bao

DOI: https://doi.org/10.1088/2040-8978/12/4/045702

IF: 2.1

2010-01-01

Journal of Optics

Abstract:On the basis of a modified Mach-Zehnder interferometer, this paper proposes a two-shot point-diffraction interferometer (PDI), by which two pi-shifted interferograms are created according to the principle of half-wave loss and are simultaneously captured by a single CCD camera. After an arbitrary unknown phase shift is induced, a second and final shot captures these last two patterns. Then a novel algorithm based on statistical principles is developed to extract the actual phase shift and the wavefront phase from four interferograms. The combination of two required shots and a robust algorithm allows the proposed PDI to be implemented efficiently and accurately. Related simulation and experiments are conducted to prove the correctness of the proposed method.
Development of Two-Frame Shadow Moiré Profilometry by Iterative Self-Tuning Technique

Hubing Du,Shaofeng Zhang,Zixin Zhao,Jianhong Yu,Haitao Liu

DOI: https://doi.org/10.1117/1.oe.57.11.114101

IF: 1.3

2018-01-01

Optical Engineering

Abstract:Shadow moire fringes have a complex intensity distribution, which makes the existing arcsine function or arccosine function that is used in random phase-shift extraction algorithms unstable in applications. We propose a high-precision algorithm to determine the random phase shift in a robust way. The idea consists of constructing three consecutive fringe patterns by the addition of two background terms suppressed fringe patterns. Then, an iterative self-tuning phase-shifting algorithm is developed to extract the measurement phase in a pointwise manner. Due to the use of an iterative procedure and tangent function, the present method can evaluate the phase shift accurately and robustly and can be implemented easily in many applications. In addition, the proposed method provides a solution for the development of the two-frame random shadow moire technique. We present simulation and optical experiments to demonstrate the correctness of the proposed method. The results show that the proposed method performs better than other methods. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE).
Phase-Tilting and Rotation Interferometry for Dynamic Optical Measurement

Yufeng Yuan,Jianhao Ruan,Mengqi Rao,Xinyu Zhang,Yuehong Yin

DOI: https://doi.org/10.1016/j.optlastec.2024.110574

IF: 4.939

2024-01-01

Optics & Laser Technology

Abstract:In this study, a phase-tilt-rotation iteration algorithm is proposed to realize the phase interferometry measurement of a wafer supported by an air flotation tray with random phase tilt-shifting and rotation vibration. The phase distribution and tilt-shifting values are retrieved by the four-step iteration method, while the rotation values are extracted by the amplified phase distribution and low-frequency morphological characteristics acquired by the spatial carrier interferometry method, with the iterative closest point algorithm. Accuracy phase distribution can be achieved by alternately optimizing the above two processes. The simulation and experiment are carried out to demonstrate the high performance of the proposed method. The results show that it works well with the vibration of random tilt-shifting and rotation on traditional interferometers without additional optical structures.
Phase Retrieval in Two-Shot Phase-Shifting Interferometry Based on Phase Shift Estimation in a Local Mask.

Chao Tian,Shengchun Liu

DOI: https://doi.org/10.1364/oe.25.021673

IF: 3.8

2017-01-01

Optics Express

Abstract:Fringe analysis in two-shot phase-shifting interferometry is important but meets challenges due to a limited number of images, corrupting noise, and background modulation. Here we propose an effective algorithm for phase retrieval from two interferograms with unknown phase shifts. The algorithm first evaluates the phase shift in a local mask through phase fitting and global optimization and then computes a full-field phase map using an arctangent function. Since the phase shift evaluation is performed within a local mask, the algorithm is fast compared with conventional optimization-based algorithms and typically needs tens of seconds to complete the processing. Computer simulation and experimental results show that the proposed algorithm has excellent performance compared with state-of-the-art algorithms. A complete software package of the algorithm in MATLAB is available at http://two-shot.sourceforge.io/.
Three frames phase-shifting shadow moiré using arbitrary unknown phase steps

Hubing Du,Hong Zhao,Bing Li,Jinlei Zhao,Shixun Cao

DOI: https://doi.org/10.1088/0957-0233/23/10/105201

IF: 2.398

2012-01-01

Measurement Science and Technology

Abstract:A method combining the spatial and temporal fringe analysis techniques is proposed to extract the phase from shadow moire interferogram with random phase shift. The proposed method first determines the grating translation difference based on the spiral phase transform technique. Then the initial phase shift is estimated. After that a generalized iterative least-squares method is developed to retrieve the accurate phase map using three interferogram frames. The proposed method relaxes the restriction on phase shift calibration between frames and provides stable and correct convergence in a fast way. Simulation and experiment demonstrate the effectiveness of this method. It shows our method possesses a superior performance than the existing typical phase-shifting algorithm. The proposed method is suitable for phase-shifting shadow moire.
Two-Frame Phase-Shifting Interferometry for Testing Optical Surfaces

Chao Tian,Shengchun Liu

DOI: https://doi.org/10.1364/oe.24.018695

2016-01-01

Abstract:Standard phase-shifting interferometry (PSI) generally requires collecting at least three phase-shifted interferograms to extract the physical quantity being measured. Here, we propose the application of a simple two-frame PSI for the testing of a range of optical surfaces, including flats, spheres, and aspheres. The two-frame PSI extracts modulated phase from two randomly phase-shifted interferograms using a Gram-Schmidt algorithm, and can work in either null testing or non-null testing modes. Since only two interferograms are used for phase demodulation and the phase shift amount can be random, requirements on environmental conditions and phase shifter calibration are greatly relaxed. Experimental results of three different mirrors suggest that the two-frame PSI can achieve comparable measurement precision with conventional multi-frame PSI, but has faster data acquisition speed and less stringent hardware requirements. The proposed two-frame PSI expands the flexibility of PSI and holds great potential in many applications.

Two-frame random phase-shifting interferometry immune to the influence of tilted phase-shift

Phase Detection from Two Phase-Shifting Interferograms

Fast and Robust Two-Frame Random Phase-Shifting Interferometry Without Pre-Filtering.

Two-frame advanced iterative self-tuning algorithm for accurate phase retrieval

Accurate two-step random phase retrieval approach without pre-filtering based on hyper ellipse fitting

Discussions about FFT-based two-step phase-shifting algorithm

Phase Error Correction by &Lt;inline-Formula&gt;&lt;math Display="inline" Overflow="scroll"&gt;&lt;mi&gt;π&lt;/mi&gt;&lt;/math&gt;&lt;/inline-Formula&gt;-shift Odd-Step Fringe Projection and Speckle Filtering in Phase Measuring Profilometry

Influence of Alignment Error and Random Noise on Interferometry Flat Sub-Aperture Stitching

High-accuracy Three-dimensional Measurement by Improving the Asymmetry of Dithered Patterns

Phase-tilting interferometry for optical testing.

On-line Three-Dimensional Inspection Using Randomly Phase-Shifting Fringe Based on Least-Square Iteration

Fast and precise single-frame phase demodulation interferometry

Fast and Accurate Two-Frame Phase Demodulation Algorithm with Statistical Averaging

Five-Frame Phase-Shifting Algorithm Based On The Immunity To Phase-Shifting Error

Design of algorithms for phase shifting interferometry using self-convolution of the rectangle window

Two-shot Point-Diffraction Interferometer with an Unknown Phase Shift

Development of Two-Frame Shadow Moiré Profilometry by Iterative Self-Tuning Technique

Phase-Tilting and Rotation Interferometry for Dynamic Optical Measurement

Phase Retrieval in Two-Shot Phase-Shifting Interferometry Based on Phase Shift Estimation in a Local Mask.

Three frames phase-shifting shadow moiré using arbitrary unknown phase steps

Two-Frame Phase-Shifting Interferometry for Testing Optical Surfaces

Phase Error Correction by &Lt;inline-Formula><math Display="inline" Overflow="scroll"><mi>π</mi></math></inline-Formula>-shift Odd-Step Fringe Projection and Speckle Filtering in Phase Measuring Profilometry