Effect of external electric field on morphology, structure and optical properties of β-Ga2O3 microstructures grown by CVD method

Shuang Zhao,Qiuju Feng,Chong Gao,Deyu Wang,Yan Xing,Jinzhu Xie,Zengjie Dong,Mengke Li,Hongwei Liang
DOI: https://doi.org/10.1016/j.mssp.2020.105142
IF: 4.1
2020-09-01
Materials Science in Semiconductor Processing
Abstract:Uniform and regularly arranged β-Ga2O3 microstructures were grown on patterned sapphire substrates (PSS) by the external electric field assisted chemical vapor deposition method at applied voltages in the range of 0–80 V. It was found that the voltage has a significant effect on the growth rate, surface morphology and crystalline quality of β-Ga2O3. When the external voltage increases, the β-Ga2O3 growth rate on the PSS increases and the crystal quality improves. When the external voltage is 80 V, a β-Ga2O3 thin film with high crystalline quality was obtained. Furthermore, the absorption spectra indicated that the absorption edge of the samples showed a blue shift with increasing external voltage. These results show that the crystal quality of the sample was improved after applying an external electric field.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied
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