Abstract:Despite the superiority in quantum properties, self-assembled semiconductor quantum dots face challenges in terms of scalable device integration because of their random growth positions, originating from the Stranski-Krastanov growth mode. Even with existing site-controlled growth techniques, for example, nanohole or buried stressor concepts, a further lithography and etching step with high spatial alignment requirements isnecessary to accurately integrate QDs into the nanophotonic devices. Here, we report on the fabrication and characterization of strain-induced site-controlled microcavities where site-controlled quantum dots are positioned at the antinode of the optical mode field in a self-aligned manner without the need of any further nano-processing. We show that the Q-factor, mode volume, height, and the ellipticity of site-controlled microcavities can be tailored by the size of an integrated AlAs/Al2O3 buried stressor, with an opening ranging from 1 to 4 $\mu$m. Lasing signatures, including super-linear input-output response, linewidth narrowing near threshold, and gain competition above threshold, are observed for a 3.6-$\mu$m self-aligned cavity with a Q-factor of 18000. Furthermore, by waiving the rather complex lateral nano-structuring usually performed during the fabrication process of micropillar lasers and vertical-cavity surface emitting lasers, quasi-planar site-controlled cavities exhibit no detrimental effects of excitation power induced heating and thermal rollover. Our straightforward deterministic nanofabrication concept of high-quality quantum dot microcavities integrates seamlessly with the industrial-matured manufacturing process and the buried-stressor techniques, paving the way for exceptional scalability and straightforward manufacturing of high-\b{eta} microlasers and bright quantum light sources.

High- β lasing in photonic-defect semiconductor-dielectric hybrid microresonators with embedded InGaAs quantum dots

High-$β$ lasing in photonic-defect semiconductor-dielectric hybrid microresonators with embedded InGaAs quantum dots

Microlaser based on a hybrid structure of a semiconductor nanowire and a silica microdisk cavity.

Ultra-Low Threshold Lasing In A Quantum Dot Microdisk Cavity

Mode Selection in InGaAs/InGaAsP Quantum Well Photonic Crystal Lasers Based on Coupled Double-Heterostructure Cavities.

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Investigations of a coherently driven semiconductor optical cavity QED system

Photonic integrated circuits fabricated using quantum well intermixing

Self-aligned photonic defect microcavities with site-controlled quantum dots

Quantum-dot microlasers based on whispering gallery mode resonators

Quantum Well Intermixing For The Realization Of Photonic Integrated Circuits

Microcavities: Highly Unidirectional Emission and Ultralow‐Threshold Lasing from On‐Chip Ultrahigh‐Q Microcavities (adv. Mater. 35/2012)

Optimization of three-dimensional micropost microcavities for cavity quantum electrodynamics

A hemispherical, high-solid-angle optical micro-cavity for cavity-QED studies

InAs/GaAs Quantum Dot Microlasers Formed on Silicon Using Monolithic and Hybrid Integration Methods

Distinctive Signature of Indium Gallium Nitride Quantum Dot Lasing in Microdisks Cavities

Stable continuous-wave lasing from discrete cesium lead bromide quantum dots embedded in a microcavity

Indistinguishable photons from the resonance fluorescence of a single quantum dot in a microcavity

High Q-Factor Single-Mode Lasing in Inorganic Perovskite Microcavities with Microfocusing Field Confinement.

Long-wavelength InAs/InAlGaAs quantum dot microdisk lasers on InP (001) substrate

Microring quantum cascade surface emitting lasers