Abstract:Waveguide-integrated mid-infrared (MIR) photodetectors are pivotal components for developing molecular spectroscopy applications, leveraging mature photonic integrated circuit (PIC) technologies. Despite various strategies, critical challenges still remain in achieving broadband photoresponse, cooling-free operation, and large-scale complementary-metal-oxide-semiconductor (CMOS)-compatible manufacturability. To leap beyond these limitations, the bolometric effect - a thermal detection mechanism - is introduced into the waveguide platform. More importantly, we pursue a free-carrier absorption (FCA) process in germanium (Ge) to create an efficient light-absorbing medium, providing a pragmatic solution for full coverage of the MIR spectrum without incorporating exotic materials into CMOS. Here, we present an uncooled waveguide-integrated photodetector based on a Ge-on-insulator (Ge-OI) PIC architecture, exploiting the bolometric effect combined with FCA. Notably, our device exhibits a broadband responsivity of ~12 mA/W across 4030-4360 nm (and potentially beyond), challenging the state of the art, while achieving a noise-equivalent power of 3.4x10^-9 W/Hz^0.5 at 4180 nm. We further demonstrate label-free sensing of carbon dioxide using our integrated photodetector and sensing waveguide on a single chip. This approach to room-temperature waveguide-integrated MIR photodetection, harnessing bolometry with FCA in Ge, not only facilitates the realization of fully integrated lab-on-a-chip systems with wavelength flexibility but also provides a blueprint for MIR PICs with CMOS-foundry-compatibility.

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