Design and Characterization of Four-Degree-of-Freedom Fast Steering Mirror for Laser Compensation System
Chien-Sheng Liu,Kun-Cheng Jiang,Ming-Fu Chen,Po-Ming Lin
DOI: https://doi.org/10.1109/tia.2024.3360028
IF: 4.079
2024-01-01
IEEE Transactions on Industry Applications
Abstract:The accuracy and stability of laser are influenced not only by external environmental factors but also by the laser internal structure, heat source, input source, etc., resulting in four-degree-of-freedom (4-DOF) laser disturbances. In this study, to reduce the laser disturbances and improve laser quality, a 4-DOF fast steering mirror (FSM) with double Porro prisms, which is driven by a voice coil motor (VCM), was designed for a laser compensation system. The 4-DOF FSM addressed the limitations of commercial laser compensation systems by achieving a shorter optical path length, reducing the number of components, and simplifying the setup of laser compensation systems at various positions. Furthermore, it enhanced the static and dynamic performance of a 4-DOF FSM proposed in a previous study. Finite element analysis was conducted to analyze both the electromagnetic structure and mechanical structure of the proposed 4-DOF FSM. Furthermore, a mathematical model was established for its motion dynamics, ensuring that its static and dynamic performance satisfied the conditions of compensating laser disturbances. Finally, a PID closed-loop control was established for the 4-DOF FSM laser compensation system. By comparing the differences before and after laser compensation using the 4-DOF FSM, the compensatory function of the 4-DOF laser compensation system was validated, achieving real-time compensation for laser disturbances.
engineering, electrical & electronic, multidisciplinary