Abstract:Digital Micromirror Devices, extensively employed in projection displays offer rapid, polarization-independent beam steering. However, they are constrained by microelectromechanical system limitations, resulting in reduced resolution, limited beam steering angle and poor stability, which hinder further performance optimization. Liquid Crystal on Silicon technology, employing liquid crystal (LC) and silicon chip technology, with properties of high resolution, high contrast and good stability. Nevertheless, its polarization-dependent issues lead to complex system and low efficiency in device applications. This paper introduces a hybrid integration of metallic metasurface with nematic LC, facilitating a polarization-independent beam steering device capable of large-angle deflections. Employing principles of geometrical phase and plasmonic resonances, the metallic metasurface, coupled with an electronically controlled LC, allows for dynamic adjustment, achieving a maximum deflection of ± 27.1°. Additionally, the integration of an LC-infused dielectric grating for dynamic phase modulation and the metasurface for polarization conversion ensures uniform modulation effects across all polarizations within the device. We verify the device's large-angle beam deflection capability and polarization insensitivity effect in simulations and propose an optimization scheme to cope with the low efficiency of individual diffraction stages.

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