Crafting chirality in three dimensions via a novel fabrication technique for bound states in the continuum metasurfaces

Zaid Haddadin,Anna My Nguyen,Lisa V. Poulikakos
DOI: https://doi.org/10.1038/s41377-023-01368-z
2024-02-05
Light Science & Applications
Abstract:An additional deposition step was added to a multi-step electron beam lithographic fabrication process to unlock the height dimension as an accessible parameter for resonators comprising unit cells of quasi-bound states in the continuum metasurfaces, which is essential for the geometric design of intrinsically chiral structures.
optics
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