Tailoring the Surface Properties of ZnO Nanowires by ALD Deposition

Camilla Baratto,Guido Faglia,Thi Than Le Dang,Matteo Ferroni,Viktoria Holovanova,Bohdan Nazarchuk,Hanna Hakola,Tapio Niemi,Nikolai Tkachenko,Viacheslav Golovanov
DOI: https://doi.org/10.1002/admt.202400937
IF: 6.8
2024-09-09
Advanced Materials Technologies
Abstract:Nanowires (NWs) growing from selected areas connect each other in the middle of the contact. Conformal coating by atomic layer deposition technique with sub‐monolayers of Al2O3 and TiO2 is investigated to modify the surface of the NWs allowing tailoring the selectivity and sensitivity of the nanostructures. Innovative research on metal‐oxide gas sensors involves nanostructuring and surface modification as key elements to tailor sensitivity and selectivity. This work addresses a ZnO nanowire‐based sensing device obtained by coupling a lithographically prepared substrate with hydrothermal ZnO growth, to align and interconnect the nanowires between two electrical contacts. Furthermore, conformal coating by atomic layer deposition technique allows functionalization of the surface of the nanowires with sub‐monolayers of Al2O3 and TiO2. A detailed analysis is carried out from a morphological and structural point of view with photoluminescence and Raman spectroscopy and electron microscopy. The material characterization results are analyzed in comparison with the functional characterization in gases toward reducing (NO2) and oxidizing (H2S) gases. Unparalleled sensing enhancement with Atomic Layer Deposition functionalization is obtained for NO2 detection. The passivation role of surface states is discussed combining information from experimental techniques with a proposed model.
materials science, multidisciplinary
What problem does this paper attempt to address?