A Novel Short-Cavity Laser with Deep-Grating Distributed Bragg Reflectors

Toshihiko Baba Akihiro Matsutani,Toshikazu Mukaihara Toshikazu Mukaihara,Fumio Koyama Fumio Koyama,Kenichi Iga Kenichi Iga,Toshihiko Baba,Motoshi Hamasaki,Nobuaki Watanabe,Pasu Kaewplung Akihiro Matsutani,Toshikazu Mukaihara,Fumio Koyama,Kenichi Iga
DOI: https://doi.org/10.1143/jjap.35.1390
IF: 1.5
1996-02-28
Japanese Journal of Applied Physics
Abstract:We have proposed a novel short-cavity laser with deep-grating distributed Bragg reflectors (DBRs). We monolithically fabricated a 0.98 µm InGaAs/AlGaAs device and 1.55 µm GaInAsP/InP device using electron beam lithography and a reactive ion beam etching technique. The lasing operation of both devices was achieved at room temperature. From a comparison of the threshold current from the experimental result with that from the theoretical result, the reflectivity of formed DBRs was estimated to be less than 30%. The theory also predicts that the ideal DBR exhibits a high reflectivity over 97% even with 3 periods of grating. It achieves lasing operation with a threshold current less than 100 µA using a cavity shorter than 10 µm. This high performance is realized by reducing the surface roughness and damage to etched sidewalls and improving the reflectivity of the DBR.
physics, applied
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