Sensitive, small, broadband and scalable optomechanical ultrasound sensor in silicon photonics
Wouter J. Westerveld,Md. Mahmud-Ul-Hasan,Rami Shnaiderman,Vasilis Ntziachristos,Xavier Rottenberg,Simone Severi,Veronique Rochus,Wouter J. Westerveld,Md. Mahmud-Ul-Hasan,Rami Shnaiderman,Vasilis Ntziachristos,Xavier Rottenberg,Simone Severi,Veronique Rochus
DOI: https://doi.org/10.1038/s41566-021-00776-0
IF: 35
2021-03-11
Nature Photonics
Abstract:Ultrasonography<sup><a href="/articles/s41566-021-00776-0#ref-CR1">1</a></sup> and photoacoustic<sup><a href="/articles/s41566-021-00776-0#ref-CR2">2</a>,<a href="/articles/s41566-021-00776-0#ref-CR3">3</a></sup> (optoacoustic) tomography have recently seen great advances in hardware and algorithms. However, current high-end systems still use a matrix of piezoelectric sensor elements, and new applications require sensors with high sensitivity, broadband detection, small size and scalability to a fine-pitch matrix. This work demonstrates an ultrasound sensor in silicon photonic technology with extreme sensitivity owing to an innovative optomechanical waveguide. This waveguide has a tiny 15 nm air gap between two movable parts, which we fabricated using new CMOS-compatible processing. The 20 μm small sensor has a noise equivalent pressure below 1.3 mPa Hz<sup>−1/2</sup> in the measured range of 3–30 MHz, dominated by acoustomechanical noise. This is two orders of magnitude better than for piezoelectric elements of an identical size<sup><a href="/articles/s41566-021-00776-0#ref-CR4">4</a></sup>. The demonstrated sensor matrix with on-chip photonic multiplexing<sup><a href="#ref-CR5">5</a>,<a href="#ref-CR6">6</a>,<a href="/articles/s41566-021-00776-0#ref-CR7">7</a></sup> offers the prospect of miniaturized catheters that have sensor matrices interrogated using just a few optical fibres, unlike piezoelectric sensors that typically use an electrical connection for each element.
optics,physics, applied