Abstract:Digital holographic microscopy (DHM) is an established technique for the investigation of biological samples and very promising for non-destructive testing. As DHM is an optical metrology technique it enables a non-contact, non-destructive and fast measurement which can be used for material characterization and quality control. DHM provides amplitude and phase information which originate from optical path differences and refractive index changes of the material, thus it is able to measure topographic structures. Especially the non-destructive inspection of buried or capped structures such as microelectromechanical systems (MEMS) is still challenging, due to the absorption in the covering layer and interference of light between the different layers. In this paper we present a common-path digital holographic setup for the investigation of reflective samples. By choosing a wavelength at which the covering layer is transparent, laser light can pass this surface. Furthermore, we employ a coherence gating effect utilizing a laser diode below threshold with reduced temporal coherence to diminish speckle patterns and to suppress interference between the layers. At the same time the spatial coherence remains high which improves the image quality. Using the angular spectrum method and a quality guided phase unwrapping algorithm, we successfully reconstruct 3D images of buried structures. In addition Zernike polynomials reduce the effect of wave distortions within the setup. Overall a lateral resolution of about 1.5 μm can be achieved.

Sound wave detection by common-path digital holography

Visual measurement of instable sound field using common-path off-axis digital holography

One-Shot In-Line Digital Holography Based Two-Dimensional Hilbert Demodulation Technique

Double field-of-view single-shot common-path off-axis reflective digital holographic microscope

Wavefront division digital holography

An Approach For Sensing Underwater Particles Using Digital Holographic Imaging

Acoustic Holography Method for Measuring Moving Sound Source with Correction for Doppler Effect in Time-Domain

Live Cell Imaging by Single-Shot Common-Path Wide Field-of-View Reflective Digital Holographic Microscope

The Use of Digital/electronic Holography for Biological Applications

Digital holography for the investigation of buried structures with a common-path reflection microscope

Recent Advances and Applications of Digital Holography in Multiphase Reactive/nonreactive Flows: a Review

Video visualization for moving sound sources based on binoculars stereo and acoustical holography

Common-path digital holographic microscopy based on a volume holographic grating for quantitative phase imaging

Dynamic Acoustic Holography: One-Shot High-Precision and High-Information Methodology

Signal Decoupling In Digital Holography Via Compressive Sensing

An improved acoustic holography for high-speed sound sources identification and visualization

A Hybrid Acoustic Holography Technique for Moving Sound Source Identification Based on Wave Superposition Algorithm

Acoustic hologram–induced virtual in vivo enhanced waveguide (AH-VIEW)

Multiplexed digital holography for fluid surface profilometry

Dual-plane coupled phase retrieval for non-prior holographic imaging