Interpretable structure-property correlation in X-Ray diffraction patterns of HfZrO thin films via machine learning

Lei Feng,Takahiro Nakamura,Zeyuan Ni
DOI: https://doi.org/10.35848/1347-4065/ad2c67
IF: 1.5
2024-02-22
Japanese Journal of Applied Physics
Abstract:Abstract The X-ray diffraction (XRD) patterns of materials contain important and rich information in terms of structure, strain state and grain size, etc. The XRD can become a powerful fingerprint for materials characterizations when it’s combined with machine learning techniques. Attempts utilizing machine learning based methods mainly focus on phase identification for mixture compounds. Herein, we applied machine learning based method linking XRD patterns of HfZrO thin films directly to their electronic properties in experiments. In accordance with conventional understanding, the machine learning model suggests that non-monoclinic (NM) phases of HfO2, ZrO2 are among the main contributors to higher relative permittivity and lower leakage current. Furthermore, some minor interfacial phases like TiOx and ZrNx are also proposed to be even more important contributors to our target electronic properties. Our research demonstrates that machine learning has the potential to reveal minor XRD signals from sub-1 nm interfacial layers that have long been considered undetectable and thus ignored by human interpretation.
physics, applied
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