Silicon: the Semiconductor Material

W. Heywang,K. H. Zaininger
DOI: https://doi.org/10.1007/978-3-662-09897-4_2
IF: 3.4
2004-01-01
Silicon
Abstract:Fifty years of silicon for semiconductor device applications is the milestone at which this series of articles has been written, which will present the many-faceted development of all the technologies that are connected with it, their present status, and recognizable future trends. The individual articles will cover topics such as:growth of single crystals and its reproducibility in industrial applicationspolycrystalline and amorphous siliconepitaxial technologies and thin filmscrystal defects, impurities, and dopingvarious processes for micro- and nano-structuringmaterials requirements from the vantage point of the users in the fields of microelectronics, power electronics, optoelectronics, and micromechanicsinterfaces to other materials such as III-V compounds, as well as the whole area of bioelectronics.
materials science, multidisciplinary,chemistry, physical
What problem does this paper attempt to address?