Abstract:With the rise of the new energy industry, the number of new energy vehicles is increasing year by year, however, the thermal runaway of lithium-ion (Li-ion) batteries is a tough problem. As a key component of the battery management system (BMS), a high-performance, interchangeable, and low-cost temperature sensor is essential to improve the safety of power batteries in new energy vehicles. In this article, a batch of platinum (Pt) resistance temperature sensors with ten kinds of line widths were prepared by using micro-electro-mechanical system (MEMS) batch microfabricating technology. After tests, these batch-prepared temperature sensors possess high performance, small size, and low cost. They showed extremely high linearity of resistance-temperature curves (<inline-formula> <tex-math notation="LaTeX">${R}^{{2}} >$ </tex-math></inline-formula> 0.9999) and superior accuracy (<inline-formula> <tex-math notation="LaTeX">$< 0.3~^{\circ }\text{C}$ </tex-math></inline-formula>). Besides, the effects that came from MEMS technology were explored. The batch of temperature sensors showed excellent consistency of linearity and temperature coefficient of resistance (TCR), 99.99% and 98.89%, respectively. Furthermore, the temperature sensor exhibited excellent repeatability and stability. The coefficient of variation (CV) is only 0.31% for five repeated calibration experiments and the max temperature deviation is below 0.05 °C in stability tests. Temperature sensors with <inline-formula> <tex-math notation="LaTeX">$45~\mu \text{m}$ </tex-math></inline-formula> linewidth have the best interchangeability of all kinds with interchangeable temperature differences of less than 1.5 °C. All the results indicate that the batch microfabricated sensors are suitable for large-scale measurement requirements for Li-ion batteries in new energy vehicles.

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