Abstract:Electro-optic modulators transform electronic signals into the optical domain and are critical components in modern telecommunication networks, RF photonics, and emerging applications in quantum photonics, neuromorphic photonics, and beam steering. All these applications require integrated and voltage-efficient modulator solutions with compact form factors that are seamlessly integrable with silicon photonics platforms and feature near-CMOS material processing synergies. However, existing integrated modulators are challenged to meet these requirements. Conversely, emerging electro-optic materials heterogeneously and monolithically integrated with Si photonics open up a new avenue for device engineering. Indium tin oxide (ITO) is one such compelling material for heterogeneous integration in Si exhibiting formidable electro-optic effect characterized by unity-order index change at telecommunication frequencies. Here we overcome these limitations and demonstrate a monolithically integrated ITO electro-optic modulator based on a Mach Zehnder interferometer featuring a high-performance half-wave voltage and active device length product of VπL = 0.52 V mm. We show that the unity-strong index change enables a 30 μm-short π-phase shifter operating ITO in the index-dominated region away from the epsilon-near-zero point for reduced losses. This device experimentally confirms electrical phase shifting in ITO enabling its use in applications such as compact phase shifters, nonlinear activation functions in photonic neural networks, and phased array applications for LiDAR.

Ultra-sensitive all-optical phase modulation based on a fiber optic interferometer combined with Ti_3C_2T_x MXene-incorporated PDMS

Ultra-sensitive all-optical phase modulation based on a fiber optic interferometer combined with Ti 3 C 2 T x MXene-incorporated PDMS.

Ultra-sensitive all-optical phase modulation based on a fiber optic interferometer combined with Ti<sub>3</sub>C<sub>2</sub>T<sub>x</sub> MXene-incorporated PDMS

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Ultrafast All-Optical Graphene Modulator.

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Ultracompact optical modulator based on graphene-silica metamaterial.

Thermal stress-induced all-optical modulation in MXene-coated polarization maintaining fiber

All-Optical Modulator Using MXene Inkjet-Printed Microring Resonator

All-fiber modulator derived from the large-transverse-offset Mach-Zehnder interferometer coated with ITO

Low-power infrared-tunable all-optical intensity modulator based on micro-nano fiber integrated with 3C-SiC nanowires

All‐Optical Phosphorene Phase Modulator with Enhanced Stability under Ambient Conditions

Polymer-Based Electrooptical

Ultra-Compact Graphene-Embedded Optical Phase Modulators

Integrated Fabry–Perot Interferometer Based on Er/Yb Co-Doped Fiber for All-Optical Phase Modulation

Coupling-enhanced Dual ITO Layer Electro-absorption Modulator in Silicon Photonics

All-fiber All-Optical Phase Controller Based on F-P Interferometer and Er/Yb Co-Doped Fiber

Phase-shifted demodulation scheme for fiber-optic interferometric sensors with combined waveform phase modulation

0.52 V mm ITO-based Mach-Zehnder modulator in silicon photonics

Fiber-based all-optical modulation based on two-dimensional materials

Ultra-compact electro-optic phase modulator based on a lithium niobate topological slow light waveguide