A Low Power, Microvalve-Regulated Drug Delivery System using a SI Micro-Spring Pressurized Balloon Reservoir

A. T. Evans,J.M. Park,G. Nellis,S. Klein,J. Feller,L. Salerno,Y. Gianchandani
DOI: https://doi.org/10.1109/SENSOR.2007.4300142
2007-06-10
Abstract:This paper reports on a drug delivery system that provides modulated delivery of liquid-phase chemicals. The device uses silicon torsion springs on a 2times3 cm2 chip to pressurize a soft polymeric reservoir and regulate flow with a piezoelectricaly actuated silicon microvalve that is 1.5times1.5times1 cm3. Using the finished device, regulated diffusion of a fluorescent dye into agar gel was demonstrated. Fluid flow out of the 500 muL reservoir could be regulated from 10-500 muL/min with up to 80 kPa of delivery pressure. Typical regulation consumes 0.136 muW of power. Analysis of the valve, reservoir springs, and a model based on pressure-enhanced diffusion are presented and are validated by experimental data.
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