3DOF displacement sensor based on the self-imaging effect of optical micro-gratings

Hao Yang,Mengdi Zhang,Lijun Guo,Zhiyong Yang,Mengwei Li,Chenguang Xin
DOI: https://doi.org/10.1364/ao.523811
IF: 1.9
2024-05-10
Applied Optics
Abstract:Hao Yang, Mengdi Zhang, Lijun Guo, Zhiyong Yang, Mengwei Li, Chenguang Xin In recent years, there has been an increasing demand for a multiple degrees of freedom (DOF) measurement system with high performance and ... [Appl. Opt. 63, 3984-3990 (2024)]
optics
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