Abstract:Using movable emissive and floating probes, we determined the plasma and floating potentials of an ionization zone (spoke) in a direct current magnetron sputtering discharge. Measurements were recorded in a space and time resolved manner, which allowed us to make a three-dimensional representation of the plasma potential. From this information we could derive the related electric field, space charge, and the related spatial distribution of electron heating. The data reveal the existence of strong electric fields parallel and perpendicular to the target surface. The largest E-fields result from a double layer structure at the leading edge of the ionization zone. We suggest that the double layer plays a crucial role in the energization of electrons since electrons can gain several 10 eV of energy when crossing the double layer. We find sustained coupling between the potential structure, electron heating, and excitation and ionization processes as electrons drift over the magnetron target. The brightest region of an ionization zone is present right after the potential jump, where drifting electrons arrive and where most local electron heating occurs. The ionization zone intensity decays as electrons continue to drift in the Ez × B direction, losing energy by inelastic collisions; electrons become energized again as they cross the potential jump. This results in the elongated, arrowhead-like shape of the ionization zone. The ionization zone moves in the –Ez × B direction from which the to-be-heated electrons arrive and into which the heating region expands; the zone motion is dictated by the force of the local electric field on the ions at the leading edge of the ionization zone. We hypothesize that electron heating caused by the potential jump and physical processes associated with the double layer also apply to magnetrons at higher discharge power, including high power impulse magnetron sputtering.

Drifting Ionization Zone in Sputtering Magnetron Discharges at Very Low Currents

Plasma potential of a moving ionization zone in DC magnetron sputtering

Smoothing of Discharge Inhomogeneities at High Currents in Gasless High Power Impulse Magnetron Sputtering

Investigating Instabilities in Magnetized Low-pressure Capacitively-Coupled RF Plasma using Particle-in-Cell (PIC) Simulations

High power fast pulsed magnetron discharges

Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code

Rotating spokes, potential hump and modulated ionization in radio frequency magnetron discharges

Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target

Physics of arcing, and implications to sputter deposition

Coherent High-Frequency Axial Oscillations in a Partially Magnetized Direct Current Magnetron Discharge

The Effect of Ion Current Density on Target Etching in Radio Frequency-Magnetron Sputtering Process

Physics and technology of magnetron sputtering discharges

Magnetron sputtering

A self-consistent hybrid model of kinetic striations in low-current Argon discharges

Azimuthal ion movement in HiPIMS plasmas -- Part I: velocity distribution function

Electron Shock Drift Acceleration at a Low-Mach-number, Low-plasma-beta Quasi-perpendicular Shock

Phasic Discharge Characteristics in High Power Pulsed Magnetron Sputtering

Growth of the lower hybrid drift instability in the plume of a magnetically shielded Hall thruster

Azimuthal ion movement in HiPIMS plasmas -- Part II: lateral growth fluxes